JPS6414955A - Manufacture of photosensor - Google Patents
Manufacture of photosensorInfo
- Publication number
- JPS6414955A JPS6414955A JP62170673A JP17067387A JPS6414955A JP S6414955 A JPS6414955 A JP S6414955A JP 62170673 A JP62170673 A JP 62170673A JP 17067387 A JP17067387 A JP 17067387A JP S6414955 A JPS6414955 A JP S6414955A
- Authority
- JP
- Japan
- Prior art keywords
- film
- nitride film
- etching
- plasma nitride
- passivation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Solid State Image Pick-Up Elements (AREA)
Abstract
PURPOSE:To obtain good optical characteristics by improving moisture resistance using a plasma nitride film for the passivation film of photosensor and prevent scattering of light at the interface of protection film through removal of only plasma nitride film on a photodiode. CONSTITUTION:Aluminum wirings 33 are laid, a plasma nitride film is laid as an interlayer insulation film 34, moreover a shield aluminum film 35 is formed and the shield aluminum film 35 on the photosensitive surface 37 is removed by the etching. A plasma nitride film is then formed as a passivation film 36 and the interlayer insulation film 34 and passivation film 36 are removed by the etching to form photosensitive part 37 and pad in order to expose the PSG film 70 on the photosensitive surface of region PD. For the etching of plasma nitride film, CF4+O2 (4%) gas is used. Since this gas provides a nitride film and oxide film selection ratio of 7, only the nitride film is removed almost without etching the oxide film 27.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62170673A JPS6414955A (en) | 1987-07-08 | 1987-07-08 | Manufacture of photosensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62170673A JPS6414955A (en) | 1987-07-08 | 1987-07-08 | Manufacture of photosensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6414955A true JPS6414955A (en) | 1989-01-19 |
Family
ID=15909259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62170673A Pending JPS6414955A (en) | 1987-07-08 | 1987-07-08 | Manufacture of photosensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6414955A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63170481A (en) * | 1987-01-06 | 1988-07-14 | Naigai Kaaboninki Kk | Ribbon ink for dot printer |
| JPH08213581A (en) * | 1995-11-10 | 1996-08-20 | Matsushita Electron Corp | Integrated photodetector and manufacturing method thereof |
| JPH10284711A (en) * | 1997-04-10 | 1998-10-23 | Hamamatsu Photonics Kk | Light-receiving semiconductor device with built-in bicmos |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6046674A (en) * | 1983-08-24 | 1985-03-13 | Toshiba Corp | Solid-state image pickup device |
| JPS60218868A (en) * | 1984-04-13 | 1985-11-01 | Fuji Electric Corp Res & Dev Ltd | Manufacture of compound element |
| JPS6281758A (en) * | 1985-10-07 | 1987-04-15 | Fuji Electric Co Ltd | Semiconductor integrated circuit device |
-
1987
- 1987-07-08 JP JP62170673A patent/JPS6414955A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6046674A (en) * | 1983-08-24 | 1985-03-13 | Toshiba Corp | Solid-state image pickup device |
| JPS60218868A (en) * | 1984-04-13 | 1985-11-01 | Fuji Electric Corp Res & Dev Ltd | Manufacture of compound element |
| JPS6281758A (en) * | 1985-10-07 | 1987-04-15 | Fuji Electric Co Ltd | Semiconductor integrated circuit device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63170481A (en) * | 1987-01-06 | 1988-07-14 | Naigai Kaaboninki Kk | Ribbon ink for dot printer |
| JPH08213581A (en) * | 1995-11-10 | 1996-08-20 | Matsushita Electron Corp | Integrated photodetector and manufacturing method thereof |
| JPH10284711A (en) * | 1997-04-10 | 1998-10-23 | Hamamatsu Photonics Kk | Light-receiving semiconductor device with built-in bicmos |
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