JPS6414159U - - Google Patents
Info
- Publication number
- JPS6414159U JPS6414159U JP11025587U JP11025587U JPS6414159U JP S6414159 U JPS6414159 U JP S6414159U JP 11025587 U JP11025587 U JP 11025587U JP 11025587 U JP11025587 U JP 11025587U JP S6414159 U JPS6414159 U JP S6414159U
- Authority
- JP
- Japan
- Prior art keywords
- ion plating
- plating apparatus
- vacuum chamber
- evaporation
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 claims description 12
- 238000007733 ion plating Methods 0.000 claims description 12
- 230000008020 evaporation Effects 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims 2
- 230000005284 excitation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11025587U JPH0523566Y2 (fr) | 1987-07-17 | 1987-07-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11025587U JPH0523566Y2 (fr) | 1987-07-17 | 1987-07-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6414159U true JPS6414159U (fr) | 1989-01-25 |
JPH0523566Y2 JPH0523566Y2 (fr) | 1993-06-16 |
Family
ID=31347248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11025587U Expired - Lifetime JPH0523566Y2 (fr) | 1987-07-17 | 1987-07-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0523566Y2 (fr) |
-
1987
- 1987-07-17 JP JP11025587U patent/JPH0523566Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0523566Y2 (fr) | 1993-06-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6414159U (fr) | ||
JPH0183063U (fr) | ||
JPS62110264U (fr) | ||
JPH0186054U (fr) | ||
JPS62157968U (fr) | ||
JPH02106457U (fr) | ||
JPH0242427U (fr) | ||
JPS6311560U (fr) | ||
JPS61187373U (fr) | ||
JP3364692B2 (ja) | 電磁波シールド用成膜方法と装置 | |
JPS61202048U (fr) | ||
JPH0322063U (fr) | ||
JPS63170458U (fr) | ||
JPS62110266U (fr) | ||
JPS6346465U (fr) | ||
JPH0444138U (fr) | ||
JPS5989770A (ja) | イオンスパツタリング装置 | |
JPS6188236U (fr) | ||
JPS6236065U (fr) | ||
JPS58172433U (ja) | イオン化成膜装置 | |
JPS6237082U (fr) | ||
JPS5995157U (ja) | イオンプレ−テイング装置 | |
JPS5514820A (en) | Thin film forming method by ion plating method | |
JPS59103756U (ja) | 高周波プラズマ励起用電極 | |
JPH0444363U (fr) |