JPH0444138U - - Google Patents

Info

Publication number
JPH0444138U
JPH0444138U JP8689890U JP8689890U JPH0444138U JP H0444138 U JPH0444138 U JP H0444138U JP 8689890 U JP8689890 U JP 8689890U JP 8689890 U JP8689890 U JP 8689890U JP H0444138 U JPH0444138 U JP H0444138U
Authority
JP
Japan
Prior art keywords
substrate
processed
ashes
parallel
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8689890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8689890U priority Critical patent/JPH0444138U/ja
Publication of JPH0444138U publication Critical patent/JPH0444138U/ja
Pending legal-status Critical Current

Links

JP8689890U 1990-08-20 1990-08-20 Pending JPH0444138U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8689890U JPH0444138U (fr) 1990-08-20 1990-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8689890U JPH0444138U (fr) 1990-08-20 1990-08-20

Publications (1)

Publication Number Publication Date
JPH0444138U true JPH0444138U (fr) 1992-04-15

Family

ID=31818813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8689890U Pending JPH0444138U (fr) 1990-08-20 1990-08-20

Country Status (1)

Country Link
JP (1) JPH0444138U (fr)

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