JPS6297166U - - Google Patents
Info
- Publication number
- JPS6297166U JPS6297166U JP18713985U JP18713985U JPS6297166U JP S6297166 U JPS6297166 U JP S6297166U JP 18713985 U JP18713985 U JP 18713985U JP 18713985 U JP18713985 U JP 18713985U JP S6297166 U JPS6297166 U JP S6297166U
- Authority
- JP
- Japan
- Prior art keywords
- thickness adjustment
- film
- substrate surface
- evaporation source
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18713985U JPS6297166U (fr) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18713985U JPS6297166U (fr) | 1985-12-04 | 1985-12-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6297166U true JPS6297166U (fr) | 1987-06-20 |
Family
ID=31137336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18713985U Pending JPS6297166U (fr) | 1985-12-04 | 1985-12-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6297166U (fr) |
-
1985
- 1985-12-04 JP JP18713985U patent/JPS6297166U/ja active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6297166U (fr) | ||
JPH0437257U (fr) | ||
JPH0251259U (fr) | ||
JPH0233257U (fr) | ||
JPH0363569U (fr) | ||
JPS57131364A (en) | Forming device for vapor deposited metallic film of tubes, globes or the like | |
JPS6319565U (fr) | ||
JPH0415831U (fr) | ||
JPH0290664U (fr) | ||
JPH0217550U (fr) | ||
JPS6283866U (fr) | ||
JPS617566U (ja) | 多層膜形成装置 | |
JPH0214357U (fr) | ||
JPS63115061U (fr) | ||
JPH0448259U (fr) | ||
JPH0444361U (fr) | ||
JPS61206671U (fr) | ||
JPS6155063U (fr) | ||
JPH024234U (fr) | ||
JPS6016319U (ja) | 真空蒸着による薄膜形成装置 | |
JPS62141061U (fr) | ||
JPH0282767U (fr) | ||
JPH0174260U (fr) | ||
JPS62191862U (fr) | ||
JPS6378069U (fr) |