JPS62141061U - - Google Patents
Info
- Publication number
- JPS62141061U JPS62141061U JP2517586U JP2517586U JPS62141061U JP S62141061 U JPS62141061 U JP S62141061U JP 2517586 U JP2517586 U JP 2517586U JP 2517586 U JP2517586 U JP 2517586U JP S62141061 U JPS62141061 U JP S62141061U
- Authority
- JP
- Japan
- Prior art keywords
- base material
- deposition substrate
- evaporation apparatus
- vacuum evaporation
- material particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2517586U JPS62141061U (fr) | 1986-02-25 | 1986-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2517586U JPS62141061U (fr) | 1986-02-25 | 1986-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62141061U true JPS62141061U (fr) | 1987-09-05 |
Family
ID=30825080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2517586U Pending JPS62141061U (fr) | 1986-02-25 | 1986-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62141061U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006111930A (ja) * | 2004-10-15 | 2006-04-27 | Nissin Electric Co Ltd | 成膜装置 |
-
1986
- 1986-02-25 JP JP2517586U patent/JPS62141061U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006111930A (ja) * | 2004-10-15 | 2006-04-27 | Nissin Electric Co Ltd | 成膜装置 |