JPS6412369U - - Google Patents

Info

Publication number
JPS6412369U
JPS6412369U JP10748787U JP10748787U JPS6412369U JP S6412369 U JPS6412369 U JP S6412369U JP 10748787 U JP10748787 U JP 10748787U JP 10748787 U JP10748787 U JP 10748787U JP S6412369 U JPS6412369 U JP S6412369U
Authority
JP
Japan
Prior art keywords
electrodes
electrode
rearward
cylindrical part
disk portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10748787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0615391Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10748787U priority Critical patent/JPH0615391Y2/ja
Publication of JPS6412369U publication Critical patent/JPS6412369U/ja
Application granted granted Critical
Publication of JPH0615391Y2 publication Critical patent/JPH0615391Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Particle Accelerators (AREA)
JP10748787U 1987-07-13 1987-07-13 荷電粒子減速管 Expired - Lifetime JPH0615391Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10748787U JPH0615391Y2 (ja) 1987-07-13 1987-07-13 荷電粒子減速管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10748787U JPH0615391Y2 (ja) 1987-07-13 1987-07-13 荷電粒子減速管

Publications (2)

Publication Number Publication Date
JPS6412369U true JPS6412369U (enExample) 1989-01-23
JPH0615391Y2 JPH0615391Y2 (ja) 1994-04-20

Family

ID=31341946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10748787U Expired - Lifetime JPH0615391Y2 (ja) 1987-07-13 1987-07-13 荷電粒子減速管

Country Status (1)

Country Link
JP (1) JPH0615391Y2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05234698A (ja) * 1992-02-24 1993-09-10 Tokyo Seimitsu Co Ltd 加速管
JPH08241691A (ja) * 1995-03-06 1996-09-17 Natl Res Inst For Metals 減速集束イオンビーム装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05234698A (ja) * 1992-02-24 1993-09-10 Tokyo Seimitsu Co Ltd 加速管
JPH08241691A (ja) * 1995-03-06 1996-09-17 Natl Res Inst For Metals 減速集束イオンビーム装置

Also Published As

Publication number Publication date
JPH0615391Y2 (ja) 1994-04-20

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