JPS6411945U - - Google Patents

Info

Publication number
JPS6411945U
JPS6411945U JP10594187U JP10594187U JPS6411945U JP S6411945 U JPS6411945 U JP S6411945U JP 10594187 U JP10594187 U JP 10594187U JP 10594187 U JP10594187 U JP 10594187U JP S6411945 U JPS6411945 U JP S6411945U
Authority
JP
Japan
Prior art keywords
blower
container body
mask
container
stores
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10594187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH052449Y2 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987105941U priority Critical patent/JPH052449Y2/ja
Publication of JPS6411945U publication Critical patent/JPS6411945U/ja
Application granted granted Critical
Publication of JPH052449Y2 publication Critical patent/JPH052449Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Packaging Frangible Articles (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP1987105941U 1987-07-10 1987-07-10 Expired - Lifetime JPH052449Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987105941U JPH052449Y2 (zh) 1987-07-10 1987-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987105941U JPH052449Y2 (zh) 1987-07-10 1987-07-10

Publications (2)

Publication Number Publication Date
JPS6411945U true JPS6411945U (zh) 1989-01-23
JPH052449Y2 JPH052449Y2 (zh) 1993-01-21

Family

ID=31339006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987105941U Expired - Lifetime JPH052449Y2 (zh) 1987-07-10 1987-07-10

Country Status (1)

Country Link
JP (1) JPH052449Y2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011108215A1 (ja) * 2010-03-04 2011-09-09 東京エレクトロン株式会社 基板収納装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55134239A (en) * 1979-04-04 1980-10-18 Toshiba Corp Clean box

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55134239A (en) * 1979-04-04 1980-10-18 Toshiba Corp Clean box

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011108215A1 (ja) * 2010-03-04 2011-09-09 東京エレクトロン株式会社 基板収納装置
JP2011186006A (ja) * 2010-03-04 2011-09-22 Tokyo Electron Ltd 基板収納装置
CN102714169A (zh) * 2010-03-04 2012-10-03 东京毅力科创株式会社 基板收纳装置
KR101433068B1 (ko) * 2010-03-04 2014-08-22 도쿄엘렉트론가부시키가이샤 기판 수납 장치

Also Published As

Publication number Publication date
JPH052449Y2 (zh) 1993-01-21

Similar Documents

Publication Publication Date Title
JPS6411945U (zh)
JPS6318154U (zh)
JPS63157223U (zh)
JPS63118932U (zh)
JPS61115080U (zh)
JPS61130247U (zh)
JPS6274589U (zh)
JPH0232925U (zh)
JPS61148189U (zh)
JPS6250441U (zh)
JPS6247341U (zh)
JPS6180360U (zh)
JPH0418852U (zh)
JPH0213807U (zh)
JPH0225035U (zh)
JPH0190703U (zh)
JPH01149754U (zh)
JPS6217896U (zh)
JPS6340737U (zh)
JPS63175736U (zh)
JPS63172828U (zh)
JPS62125712U (zh)
JPH0364553U (zh)
JPS63101204U (zh)
JPS62175753U (zh)