JPS6411945U - - Google Patents

Info

Publication number
JPS6411945U
JPS6411945U JP10594187U JP10594187U JPS6411945U JP S6411945 U JPS6411945 U JP S6411945U JP 10594187 U JP10594187 U JP 10594187U JP 10594187 U JP10594187 U JP 10594187U JP S6411945 U JPS6411945 U JP S6411945U
Authority
JP
Japan
Prior art keywords
blower
container body
mask
container
stores
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10594187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH052449Y2 (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987105941U priority Critical patent/JPH052449Y2/ja
Publication of JPS6411945U publication Critical patent/JPS6411945U/ja
Application granted granted Critical
Publication of JPH052449Y2 publication Critical patent/JPH052449Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Packaging Frangible Articles (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP1987105941U 1987-07-10 1987-07-10 Expired - Lifetime JPH052449Y2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987105941U JPH052449Y2 ( ) 1987-07-10 1987-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987105941U JPH052449Y2 ( ) 1987-07-10 1987-07-10

Publications (2)

Publication Number Publication Date
JPS6411945U true JPS6411945U ( ) 1989-01-23
JPH052449Y2 JPH052449Y2 ( ) 1993-01-21

Family

ID=31339006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987105941U Expired - Lifetime JPH052449Y2 ( ) 1987-07-10 1987-07-10

Country Status (1)

Country Link
JP (1) JPH052449Y2 ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011108215A1 (ja) * 2010-03-04 2011-09-09 東京エレクトロン株式会社 基板収納装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55134239A (en) * 1979-04-04 1980-10-18 Toshiba Corp Clean box

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55134239A (en) * 1979-04-04 1980-10-18 Toshiba Corp Clean box

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011108215A1 (ja) * 2010-03-04 2011-09-09 東京エレクトロン株式会社 基板収納装置
JP2011186006A (ja) * 2010-03-04 2011-09-22 Tokyo Electron Ltd 基板収納装置
CN102714169A (zh) * 2010-03-04 2012-10-03 东京毅力科创株式会社 基板收纳装置
KR101433068B1 (ko) * 2010-03-04 2014-08-22 도쿄엘렉트론가부시키가이샤 기판 수납 장치

Also Published As

Publication number Publication date
JPH052449Y2 ( ) 1993-01-21

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