JPS6410666U - - Google Patents
Info
- Publication number
- JPS6410666U JPS6410666U JP10610987U JP10610987U JPS6410666U JP S6410666 U JPS6410666 U JP S6410666U JP 10610987 U JP10610987 U JP 10610987U JP 10610987 U JP10610987 U JP 10610987U JP S6410666 U JPS6410666 U JP S6410666U
- Authority
- JP
- Japan
- Prior art keywords
- weight
- flexible portion
- viscous fluid
- hole
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 230000001133 acceleration Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Pressure Sensors (AREA)
Description
第１図、第２図ａ，ｂは本考案の一実施例を示
し、第１図は半導体加速度センサの断面図、第２
図ａ，ｂはその動きを示す断面図である。第３図
ａ，ｂ、第４図ａ〜ｃは従来例を示し、第３図ａ
は従来の半導体加速度センサを示す斜視図、第３
図ｂはそのｂ―ｂ線断面図、第４図ａ〜ｃは第３
図に示すセンサの動きを説明する断面図である。
２：ピエゾ抵抗、３，４：ストツパ、６：ダン
パオイル、２０：センサチツプ、２１：片持ち梁
、２１１：重り部、２１１ａ：貫通孔、２１２：
撓み部。
1 and 2 a and b show an embodiment of the present invention, FIG. 1 is a sectional view of a semiconductor acceleration sensor, and FIG.
Figures a and b are cross-sectional views showing the movement. 3a and 3b, and 4a to 4c show conventional examples;
is a perspective view showing a conventional semiconductor acceleration sensor;
Figure b is a cross-sectional view taken along the line bb line, and Figures 4 a to c are the 3rd cross-sectional view.
FIG. 3 is a cross-sectional view illustrating the movement of the sensor shown in the figure. 2: Piezo resistance, 3, 4: Stopper, 6: Damper oil, 20: Sensor chip, 21: Cantilever, 211: Weight portion, 211a: Through hole, 212:
Flexible part.
Claims (1)
み部と、この撓み部に設けられた重りと、前記撓
み部の撓み量に相応した信号を得る検出素子と、
前記重りに制動抵抗を与える粘性流体とを備えた
力学量センサにおいて、 前記重りに前記粘性流体が流通する貫通孔を設
けたことを特徴とする力学量センサ。[Claims for Utility Model Registration] A flexible portion formed on a sensor body and bent by an input load, a weight provided on the flexible portion, and a detection element that obtains a signal corresponding to the amount of deflection of the flexible portion.
A mechanical quantity sensor comprising: the weight and a viscous fluid that provides braking resistance, wherein the weight is provided with a through hole through which the viscous fluid flows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10610987U JPS6410666U (en) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10610987U JPS6410666U (en) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6410666U true JPS6410666U (en) | 1989-01-20 |
Family
ID=31339325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10610987U Pending JPS6410666U (en) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6410666U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004286652A (en) * | 2003-03-24 | 2004-10-14 | Denso Corp | Acceleration sensor |
| US7538363B2 (en) | 2006-05-29 | 2009-05-26 | Panasonic Corporation | Solid-state imaging device and method for fabricating the same |
-
1987
- 1987-07-10 JP JP10610987U patent/JPS6410666U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004286652A (en) * | 2003-03-24 | 2004-10-14 | Denso Corp | Acceleration sensor |
| US7538363B2 (en) | 2006-05-29 | 2009-05-26 | Panasonic Corporation | Solid-state imaging device and method for fabricating the same |
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