JPS6410665U - - Google Patents
Info
- Publication number
- JPS6410665U JPS6410665U JP10610687U JP10610687U JPS6410665U JP S6410665 U JPS6410665 U JP S6410665U JP 10610687 U JP10610687 U JP 10610687U JP 10610687 U JP10610687 U JP 10610687U JP S6410665 U JPS6410665 U JP S6410665U
- Authority
- JP
- Japan
- Prior art keywords
- weight
- flexible
- end side
- center
- regulating member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000005484 gravity Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Pressure Sensors (AREA)
Description
第１図ａ，ｂ、第２図ａ，ｂは本考案の一実施
例を示し、第１図ａは半導体加速度センサの斜視
図、第１図ｂはそのｂ―ｂ線断面図、第２図ａ，
ｂは重り部の動きを説明する断面図、第３図ａ，
ｂは変形例を示すセンサの断面図である。第４図
ａ，ｂ、第５図ａ〜ｃは従来例を示し、第４図ａ
は半導体加速度センサの斜視図、ｂはそのｂ―ｂ
線断面図、第５図ａ〜ｃは重り部の動きを説明す
る断面図である。
１：センサチツプ、１１：片持ち梁、１１ａ：
重り部、１１ｂ：撓み部、２１，２２，３１，３
２：ストツパ、２１ａ，２２ａ：傾斜面、２１ａ
，３１ｂ，３２ａ，３２ｂ：角部。
1a, b and 2a, b show an embodiment of the present invention, in which FIG. 1a is a perspective view of a semiconductor acceleration sensor, FIG. Figure a,
b is a sectional view explaining the movement of the weight part, Fig. 3a,
b is a sectional view of a sensor showing a modified example. Figures 4a and 4b and Figures 5a to 5c show conventional examples;
is a perspective view of a semiconductor acceleration sensor, b is its bb
The line cross-sectional views and FIGS. 5A to 5C are cross-sectional views for explaining the movement of the weight portion. 1: Sensor chip, 11: Cantilever beam, 11a:
Weight part, 11b: Flexible part, 21, 22, 31, 3
2: Stopper, 21a, 22a: Inclined surface, 21a
, 31b, 32a, 32b: corner.
Claims (1)
けられた重り部と、前記撓み部の撓み量に相応し
た信号を得る検出素子と、前記重り部が当接しそ
の変位を規制する当接部を有する規制部材とを備
えた力学量センサにおいて、 加速度が印加されることにより前記撓み部が撓
んだときに前記重り部の変位する面上の重り部の
重心を中心として重り部の自由端側および固定端
側の少なくとも２点が略同時に当接するように前
記規制部材の当接部の形状を定めたことを特徴と
する力学量センサ。[Scope of Claim for Utility Model Registration] A flexible part that is bent by an input load, a weight part provided on the flexible part, a detection element that obtains a signal corresponding to the amount of deflection of the flexible part, and the weight part are in contact with each other. and a regulating member having an abutment portion that regulates the displacement thereof, the center of gravity of the weight portion on a surface where the weight portion is displaced when the flexible portion is deflected by application of acceleration. A mechanical quantity sensor, characterized in that the shape of the abutting part of the regulating member is determined so that at least two points on the free end side and the fixed end side of the weight part abut on the center at the same time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10610687U JPS6410665U (en) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10610687U JPS6410665U (en) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6410665U true JPS6410665U (en) | 1989-01-20 |
Family
ID=31339319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10610687U Pending JPS6410665U (en) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6410665U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991010118A1 (en) * | 1989-12-28 | 1991-07-11 | Wacoh Corporation | Apparatus for detecting physical quantity that acts as external force and method of testing and producing this apparatus |
| US7578162B2 (en) | 1989-12-28 | 2009-08-25 | Kazuhiro Okada | Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing this apparatus |
| WO2011111539A1 (en) * | 2010-03-08 | 2011-09-15 | アルプス電気株式会社 | Physical quantity sensor |
-
1987
- 1987-07-10 JP JP10610687U patent/JPS6410665U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991010118A1 (en) * | 1989-12-28 | 1991-07-11 | Wacoh Corporation | Apparatus for detecting physical quantity that acts as external force and method of testing and producing this apparatus |
| US7578162B2 (en) | 1989-12-28 | 2009-08-25 | Kazuhiro Okada | Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing this apparatus |
| WO2011111539A1 (en) * | 2010-03-08 | 2011-09-15 | アルプス電気株式会社 | Physical quantity sensor |
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