JPS6410554A - Rotary anode x-ray generator - Google Patents

Rotary anode x-ray generator

Info

Publication number
JPS6410554A
JPS6410554A JP16579187A JP16579187A JPS6410554A JP S6410554 A JPS6410554 A JP S6410554A JP 16579187 A JP16579187 A JP 16579187A JP 16579187 A JP16579187 A JP 16579187A JP S6410554 A JPS6410554 A JP S6410554A
Authority
JP
Japan
Prior art keywords
gas
bearing
rotary anode
ray generator
atm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16579187A
Other languages
Japanese (ja)
Inventor
Masaki Yamabe
Toshihiko Osada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16579187A priority Critical patent/JPS6410554A/en
Publication of JPS6410554A publication Critical patent/JPS6410554A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent the deterioration of a cathode by using a reducing gas such as hydrogen or an inert gas for the gas of a gaseous bearing near the clearance seal in a rotary anode X-ray generator with an impregnated type cathode. CONSTITUTION:A rotary shaft 3 to hold a rotary anode 2 rotates in a high speed being held by a gaseous bearing to maintain a small clearance between an outer cylinder 10. The air of 5 atm, for example, is delivered from a gas feeding passage 12, and a clearance seal between an exhaust 15 and a target chamber functions as a resistance layer to the bearing gas. Either one of hydrogen, helium, nitrogen, argon, and krypton of 5 atm, for example, is poured from the gas feeding passage 12 as a bearing gas. Since these gases are all inert or reducing, they never corrodes the impregnated type cathode, and the stable condition of the unit can be maintained.
JP16579187A 1987-07-02 1987-07-02 Rotary anode x-ray generator Pending JPS6410554A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16579187A JPS6410554A (en) 1987-07-02 1987-07-02 Rotary anode x-ray generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16579187A JPS6410554A (en) 1987-07-02 1987-07-02 Rotary anode x-ray generator

Publications (1)

Publication Number Publication Date
JPS6410554A true JPS6410554A (en) 1989-01-13

Family

ID=15819062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16579187A Pending JPS6410554A (en) 1987-07-02 1987-07-02 Rotary anode x-ray generator

Country Status (1)

Country Link
JP (1) JPS6410554A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6200053B1 (en) 1998-12-11 2001-03-13 The Pilot Ink Co., Ltd. Ink follower composition for ballpoint pen and ballpoint pen using the same
JP2017041447A (en) * 2013-03-15 2017-02-23 ニコン・メトロロジー・エヌヴェ Rotary vacuum seal for rotating shaft, and target assembly for x-ray source

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6200053B1 (en) 1998-12-11 2001-03-13 The Pilot Ink Co., Ltd. Ink follower composition for ballpoint pen and ballpoint pen using the same
JP2017041447A (en) * 2013-03-15 2017-02-23 ニコン・メトロロジー・エヌヴェ Rotary vacuum seal for rotating shaft, and target assembly for x-ray source
US9941090B2 (en) 2013-03-15 2018-04-10 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, and rotary vacuum seal
US9947501B2 (en) 2013-03-15 2018-04-17 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US9966217B2 (en) 2013-03-15 2018-05-08 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10008357B2 (en) 2013-03-15 2018-06-26 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10020157B2 (en) 2013-03-15 2018-07-10 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10096446B2 (en) 2013-03-15 2018-10-09 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10102997B2 (en) 2013-03-15 2018-10-16 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

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