SU1132727A1 - Magnetic-discharge pump - Google Patents
Magnetic-discharge pumpInfo
- Publication number
- SU1132727A1 SU1132727A1 SU3590424/21A SU3590424A SU1132727A1 SU 1132727 A1 SU1132727 A1 SU 1132727A1 SU 3590424/21 A SU3590424/21 A SU 3590424/21A SU 3590424 A SU3590424 A SU 3590424A SU 1132727 A1 SU1132727 A1 SU 1132727A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- anode
- hollow cylinder
- cathode
- operating pressure
- pressure range
- Prior art date
Links
Abstract
FIELD: electronic engineering. SUBSTANCE: pump that has magnetic system and sealed case with axisymmetric evacuation pipe as well as cathode built up of flat titanium plates and anode assembled of a number of cylindrical cells abutting against hollow cylinder placed around evacuation pipe, both arranged axis-symmetrically within case, is provided, in addition, with one more cathode made in the form of hollow getter metal cylinder coaxially arranged inside hollow cylinder of anode; clearance between positive cathode and hollow cylinder of anode is 0.5-0.7 of anode cell diameter. Operating pressure range is extended from 2•10to 5•10Pa. EFFECT: improved speed of inert gas evacuation, eliminated argon instability, and enlarged operating pressure range.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU3590424/21A SU1132727A1 (en) | 1983-05-13 | 1983-05-13 | Magnetic-discharge pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU3590424/21A SU1132727A1 (en) | 1983-05-13 | 1983-05-13 | Magnetic-discharge pump |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1132727A1 true SU1132727A1 (en) | 1998-12-20 |
Family
ID=60538980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU3590424/21A SU1132727A1 (en) | 1983-05-13 | 1983-05-13 | Magnetic-discharge pump |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1132727A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2603348C2 (en) * | 2015-03-26 | 2016-11-27 | Закрытое акционерное общество "Научно - техническое объединение ПРИБОРСЕРВИС" (ЗАО "НТО ПРИБОРСЕРВИС") | Penning pump |
RU2656147C1 (en) * | 2017-03-06 | 2018-05-31 | Акционерное общество "Научно-производственное предприятие "Исток" имени А.И. Шокина" | Method of high-voltage training of sealed off electrovacuum device with metal-porous cathodes |
CN110491764A (en) * | 2019-09-02 | 2019-11-22 | 北京卫星环境工程研究所 | The yoke assembly of sputter ion pump |
-
1983
- 1983-05-13 SU SU3590424/21A patent/SU1132727A1/en active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2603348C2 (en) * | 2015-03-26 | 2016-11-27 | Закрытое акционерное общество "Научно - техническое объединение ПРИБОРСЕРВИС" (ЗАО "НТО ПРИБОРСЕРВИС") | Penning pump |
RU2656147C1 (en) * | 2017-03-06 | 2018-05-31 | Акционерное общество "Научно-производственное предприятие "Исток" имени А.И. Шокина" | Method of high-voltage training of sealed off electrovacuum device with metal-porous cathodes |
CN110491764A (en) * | 2019-09-02 | 2019-11-22 | 北京卫星环境工程研究所 | The yoke assembly of sputter ion pump |
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