JPS6398728U - - Google Patents
Info
- Publication number
- JPS6398728U JPS6398728U JP1986194509U JP19450986U JPS6398728U JP S6398728 U JPS6398728 U JP S6398728U JP 1986194509 U JP1986194509 U JP 1986194509U JP 19450986 U JP19450986 U JP 19450986U JP S6398728 U JPS6398728 U JP S6398728U
- Authority
- JP
- Japan
- Prior art keywords
- plasma generation
- microwave
- transport pipe
- plasma
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986194509U JPH0441172Y2 (en:Method) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986194509U JPH0441172Y2 (en:Method) | 1986-12-19 | 1986-12-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6398728U true JPS6398728U (en:Method) | 1988-06-27 |
| JPH0441172Y2 JPH0441172Y2 (en:Method) | 1992-09-28 |
Family
ID=31151549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986194509U Expired JPH0441172Y2 (en:Method) | 1986-12-19 | 1986-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441172Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000073029A (ja) * | 1998-08-26 | 2000-03-07 | Nitto Denko Corp | 粘着部材及びその製造方法 |
-
1986
- 1986-12-19 JP JP1986194509U patent/JPH0441172Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000073029A (ja) * | 1998-08-26 | 2000-03-07 | Nitto Denko Corp | 粘着部材及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441172Y2 (en:Method) | 1992-09-28 |