JPS6398666U - - Google Patents

Info

Publication number
JPS6398666U
JPS6398666U JP19503386U JP19503386U JPS6398666U JP S6398666 U JPS6398666 U JP S6398666U JP 19503386 U JP19503386 U JP 19503386U JP 19503386 U JP19503386 U JP 19503386U JP S6398666 U JPS6398666 U JP S6398666U
Authority
JP
Japan
Prior art keywords
silicon substrate
diaphragm
measurement pressure
pressure sensor
semiconductor pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19503386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19503386U priority Critical patent/JPS6398666U/ja
Publication of JPS6398666U publication Critical patent/JPS6398666U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP19503386U 1986-12-18 1986-12-18 Pending JPS6398666U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19503386U JPS6398666U (fr) 1986-12-18 1986-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19503386U JPS6398666U (fr) 1986-12-18 1986-12-18

Publications (1)

Publication Number Publication Date
JPS6398666U true JPS6398666U (fr) 1988-06-25

Family

ID=31152547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19503386U Pending JPS6398666U (fr) 1986-12-18 1986-12-18

Country Status (1)

Country Link
JP (1) JPS6398666U (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61121478A (ja) * 1984-11-19 1986-06-09 Sanyo Electric Co Ltd 半導体圧力センサの製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61121478A (ja) * 1984-11-19 1986-06-09 Sanyo Electric Co Ltd 半導体圧力センサの製造方法

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