JPS62197036U - - Google Patents

Info

Publication number
JPS62197036U
JPS62197036U JP8644386U JP8644386U JPS62197036U JP S62197036 U JPS62197036 U JP S62197036U JP 8644386 U JP8644386 U JP 8644386U JP 8644386 U JP8644386 U JP 8644386U JP S62197036 U JPS62197036 U JP S62197036U
Authority
JP
Japan
Prior art keywords
silicon wafer
silicon
hole
pressure
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8644386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8644386U priority Critical patent/JPS62197036U/ja
Publication of JPS62197036U publication Critical patent/JPS62197036U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP8644386U 1986-06-06 1986-06-06 Pending JPS62197036U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8644386U JPS62197036U (fr) 1986-06-06 1986-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8644386U JPS62197036U (fr) 1986-06-06 1986-06-06

Publications (1)

Publication Number Publication Date
JPS62197036U true JPS62197036U (fr) 1987-12-15

Family

ID=30942752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8644386U Pending JPS62197036U (fr) 1986-06-06 1986-06-06

Country Status (1)

Country Link
JP (1) JPS62197036U (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005091166A (ja) * 2003-09-17 2005-04-07 Matsushita Electric Works Ltd 半導体圧力センサ
JP2013512422A (ja) * 2009-11-26 2013-04-11 コンチネンタル オートモーティヴ ゲゼルシャフト ミット ベシュレンクテル ハフツング センサモジュールおよびセンサモジュールの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522125A (en) * 1978-08-04 1980-02-16 Hitachi Ltd Pressure sensor
JPS5821131A (ja) * 1981-07-29 1983-02-07 Toshiba Corp 半導体圧力センサ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522125A (en) * 1978-08-04 1980-02-16 Hitachi Ltd Pressure sensor
JPS5821131A (ja) * 1981-07-29 1983-02-07 Toshiba Corp 半導体圧力センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005091166A (ja) * 2003-09-17 2005-04-07 Matsushita Electric Works Ltd 半導体圧力センサ
JP2013512422A (ja) * 2009-11-26 2013-04-11 コンチネンタル オートモーティヴ ゲゼルシャフト ミット ベシュレンクテル ハフツング センサモジュールおよびセンサモジュールの製造方法

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