JPS6390435U - - Google Patents
Info
- Publication number
- JPS6390435U JPS6390435U JP18296386U JP18296386U JPS6390435U JP S6390435 U JPS6390435 U JP S6390435U JP 18296386 U JP18296386 U JP 18296386U JP 18296386 U JP18296386 U JP 18296386U JP S6390435 U JPS6390435 U JP S6390435U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- sealing
- vacuum device
- ratio
- sectional area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Gasket Seals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296386U JPS6390435U (fr) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296386U JPS6390435U (fr) | 1986-11-28 | 1986-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6390435U true JPS6390435U (fr) | 1988-06-11 |
Family
ID=31129254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18296386U Pending JPS6390435U (fr) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390435U (fr) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0398363U (fr) * | 1990-01-29 | 1991-10-11 | ||
| JP2006019101A (ja) * | 2004-06-30 | 2006-01-19 | Canon Inc | 真空機器の製造装置及び製造方法、真空機器、荷電粒子線露光装置、デバイス製造方法 |
| JP2009176822A (ja) * | 2008-01-22 | 2009-08-06 | Tokyo Electron Ltd | シール機構、シール溝、シール部材及び基板処理装置 |
-
1986
- 1986-11-28 JP JP18296386U patent/JPS6390435U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0398363U (fr) * | 1990-01-29 | 1991-10-11 | ||
| JP2006019101A (ja) * | 2004-06-30 | 2006-01-19 | Canon Inc | 真空機器の製造装置及び製造方法、真空機器、荷電粒子線露光装置、デバイス製造方法 |
| JP4559137B2 (ja) * | 2004-06-30 | 2010-10-06 | キヤノン株式会社 | 真空機器の製造装置及び製造方法 |
| JP2009176822A (ja) * | 2008-01-22 | 2009-08-06 | Tokyo Electron Ltd | シール機構、シール溝、シール部材及び基板処理装置 |