JPS6398163A - Ac discharge tube - Google Patents
Ac discharge tubeInfo
- Publication number
- JPS6398163A JPS6398163A JP24321086A JP24321086A JPS6398163A JP S6398163 A JPS6398163 A JP S6398163A JP 24321086 A JP24321086 A JP 24321086A JP 24321086 A JP24321086 A JP 24321086A JP S6398163 A JPS6398163 A JP S6398163A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- dielectric
- insulator
- discharge tube
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims abstract description 18
- 239000011810 insulating material Substances 0.000 claims abstract description 7
- 229920005573 silicon-containing polymer Polymers 0.000 claims abstract description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 229920002313 fluoropolymer Polymers 0.000 claims description 2
- 239000004811 fluoropolymer Substances 0.000 claims description 2
- 230000015556 catabolic process Effects 0.000 abstract description 6
- 230000005684 electric field Effects 0.000 abstract description 5
- 229920000642 polymer Polymers 0.000 abstract description 5
- 239000004809 Teflon Substances 0.000 abstract description 3
- 229920006362 Teflon® Polymers 0.000 abstract description 3
- 238000000465 moulding Methods 0.000 abstract 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract 1
- 229910052731 fluorine Inorganic materials 0.000 abstract 1
- 239000011737 fluorine Substances 0.000 abstract 1
- 239000011800 void material Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、交流放電管に関し、特に所定周波数（無線周
波数を含む）の交流電源により駆動されるガスレーザ放
電管に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an AC discharge tube, and particularly to a gas laser discharge tube driven by an AC power source of a predetermined frequency (including radio frequency).
一般にこの種の交流放電管は、誘電体のパイプ（例えば
セラミック管又は石英管）の外表面に少くとも１対以上
の電極を、例えばその長手方向に沿って互に対向するよ
うに直線状に配設し、該１対の電極間に上記所定の交流
電圧を印加して該管内のガス媒質を励起し所定の放電が
行われる。この場合、該誘電体のパイプは該交流電圧に
対して容量性のインピーダンスとして作用し、該電極間
に所定の交流電流が流れる。Generally, this type of AC discharge tube has at least one pair of electrodes arranged on the outer surface of a dielectric pipe (for example, a ceramic tube or a quartz tube), for example, in a straight line so as to face each other along its longitudinal direction. The predetermined alternating current voltage is applied between the pair of electrodes to excite the gas medium within the tube to generate a predetermined discharge. In this case, the dielectric pipe acts as a capacitive impedance with respect to the alternating current voltage, and a predetermined alternating current flows between the electrodes.
また上述したように、１対の電極を誘電体のパイプの外
表面上に直線状に対向させて配設した場合に生ずる該放
電管内における放電密度の不均一性を防止するため、該
１対の電極を該誘電体のパイプ上に互に交叉しないよう
に螺旋状に配設し、その長手方向からみた上記放電密度
を均一にすることも考えられている。Furthermore, as described above, in order to prevent unevenness in the discharge density within the discharge tube that occurs when a pair of electrodes are disposed linearly opposite each other on the outer surface of a dielectric pipe, the It has also been considered to arrange electrodes spirally on the dielectric pipe so as not to intersect with each other, thereby making the discharge density uniform as viewed from the longitudinal direction.
ところで、かかる電極の長手方向に沿う端縁部（図中、
符号Ｅで示される）には、該交流電圧の印加時に高電界
が形成され、それによって該端縁部Ｅの近傍にコロナ放
電を生じて電離したイオンや電子を発生し、逐には該対
向する電極間に気中放電が発生して絶縁破壊を起す危険
性があるという問題点があった。By the way, the end edge along the longitudinal direction of such an electrode (in the figure,
When the alternating current voltage is applied, a high electric field is formed, which causes a corona discharge near the edge E and generates ionized ions and electrons, which in turn cause the opposite There was a problem in that there was a risk that an air discharge would occur between the electrodes, causing dielectric breakdown.
本発明はかかる問題点を解決するためになされたもので
、少くとも該電極端部を覆うように特定の絶縁物によっ
てモールド被覆をすることによって、上記高電界の形成
を阻止し、それに伴う電極間の絶縁破壊の危険性をなく
したものである。The present invention has been made to solve this problem, and by mold-covering at least the end of the electrode with a specific insulator, the formation of the high electric field can be prevented, and the electrode This eliminates the risk of dielectric breakdown between the two.
上記問題点を解決するために、本発明においては、誘電
体のパイプの外表面に少くとも１対以上（３相の場合は
３個）の電極をそなえ、少くとも該各電極の長手方向に
沿う電極端部が絶縁物によってモールド被覆されている
、交流放電管が提供される。In order to solve the above problems, in the present invention, at least one pair or more (three in the case of three phases) of electrodes are provided on the outer surface of the dielectric pipe, and at least one pair of electrodes is provided in the longitudinal direction of each electrode. An AC discharge tube is provided, the electrode ends along which are mold coated with an insulator.
なお該モールド被覆用の材料として、シリコーンポリマ
ー系の絶縁物又はフッ素ポリマー系の絶縁物（例えばテ
フロンポリマー系の絶縁物）を用いるのが好適である。As the mold coating material, it is preferable to use a silicone polymer-based insulator or a fluoropolymer-based insulator (for example, a Teflon polymer-based insulator).
上記構成によれば、該電極端部が上記絶縁物によってモ
ールド被覆されていることによって該電極端部近傍にお
ける高電界の形成を阻止してコロナ放電の発生を防止し
、該対向する電極間において絶縁破壊を起す可能性が確
実に阻止される。According to the above structure, since the electrode end is molded and covered with the insulator, formation of a high electric field in the vicinity of the electrode end is prevented, and corona discharge is prevented from occurring between the opposing electrodes. The possibility of causing dielectric breakdown is reliably prevented.
第１図および第２図は、本発明の１実施例としての交流
放電管の構成を示すもので、ｌは誘電体のパイプ（例え
ばセラミック管または石英管など）、２．２′は該誘電
体のパイプ外表面に形成される１対の電極であって、少
くとも該各電極２，２′の長手方向に沿う電極端部Ｅを
覆うように、所定の絶縁材料によるモールド被覆が施さ
れる。1 and 2 show the configuration of an AC discharge tube as an embodiment of the present invention, where l is a dielectric pipe (for example, a ceramic tube or a quartz tube), and 2.2' is the dielectric pipe. A pair of electrodes formed on the outer surface of the body pipe, each of which is molded with a predetermined insulating material so as to cover at least the electrode end E along the longitudinal direction of each electrode 2, 2'. Ru.
ここで該モールド被覆用の絶縁材料としては、シリコー
ンポリマー系の絶縁物又はフッ（＝工ユニ；ポリマー系
の絶縁物（例えばテフロンポリマー）が好適である。Here, as the insulating material for the mold coating, a silicone polymer-based insulator or a polymer-based insulator (for example, Teflon polymer) is suitable.
すなわちこれらの絶縁物は、該電極端部Ｅを被覆する際
ゴム状の絶縁物となって該電極端部すなわち境界層に密
着し、したがってその隙間を密に充填して、ボイドが形
成されることがなく、コロナ放電発生の余地が全くなく
なる。更にその絶縁耐力も大であり、熱的にも安定であ
って、気中の耐圧を下げるような有機性のガスを放出す
ることもない。That is, when these insulators cover the electrode end E, they become rubber-like insulators and adhere closely to the electrode end, that is, the boundary layer, thus densely filling the gap and forming voids. There is no room for corona discharge to occur. Furthermore, it has a high dielectric strength, is thermally stable, and does not emit organic gases that lower the atmospheric pressure.
なお上記実施例では、該１対の電極が誘電体のパイプの
長手方向に沿って直線状に形成されているが、これら１
対の電極を上述したように例えばスパイラル状に形成す
ることも可能であり、要するに少くとも該電極の長手方
向に沿う端部を上記したような絶縁材料によってモール
ド被覆することが重要である。したがって上述したよう
な電極端部のみでなく、該電極端部を含むパイプの全周
を上記したような絶縁材料によってモールド被覆しても
よいことはいうまでもない。In the above embodiment, the pair of electrodes are formed in a straight line along the longitudinal direction of the dielectric pipe.
As mentioned above, it is also possible to form the pair electrode in a spiral shape, for example, and it is important that at least the longitudinal end of the electrode is molded and covered with the above-mentioned insulating material. Therefore, it goes without saying that not only the electrode end as described above but also the entire circumference of the pipe including the electrode end may be molded and coated with the above-mentioned insulating material.
なお本発明の電極をそなえた放電管は、所定周波数（無
線周波数を含む）の交流電源により駆動されるガスレー
ザ放電管として好適に使用しうろことは上述したとおり
である。また本発明は炭酸ガスレーザのみならず、Ｈｅ
−Ｎｅ、Ｃ０（−酸化炭素）。As described above, the discharge tube equipped with the electrode of the present invention can be suitably used as a gas laser discharge tube driven by an AC power source of a predetermined frequency (including radio frequency). Furthermore, the present invention is applicable not only to carbon dioxide lasers but also to He
-Ne, C0 (-carbon oxide).
エキシマ等の他の全てのガスレーザに適用することが可
能である。It is possible to apply to all other gas lasers such as excimer.
本発明によれば、交流放電管の電極端部近傍に高電界が
形成されてコロナ放電を発生するおそれがなく、それに
よづて、電極間に絶縁破壊を起す可能性を完全になくす
ことができる。According to the present invention, there is no risk of a high electric field being formed near the electrode ends of the AC discharge tube and causing corona discharge, thereby completely eliminating the possibility of dielectric breakdown between the electrodes. can.
第１図は、本発明の１実施例としての交流放電管の斜視
図、
第２図は、第１図に示される交流放電管の端面図である
。
（符号の説明）
１，１′・・・誘電体のパイプ、
２．２′・・・電掻、
３．３′・・・電極端部を覆うモールド絶縁物、Ｅ・・
・電極端部。FIG. 1 is a perspective view of an AC discharge tube as an embodiment of the present invention, and FIG. 2 is an end view of the AC discharge tube shown in FIG. 1. (Explanation of symbols) 1,1'...Dielectric pipe, 2.2'...Electric scraper, 3.3'...Mold insulator covering the electrode end, E...
・Electrode end.
Claims (1)
をそなえ、少くとも該各電極の長手方向に沿う電極端部
が絶縁物によってモールド被覆されていることを特徴と
する交流放電管。 ２、該モールド被覆用の材料としてシリコーンポリマー
系の絶縁物が用いられる、特許請求の範囲第１項記載の
交流放電管。 ３、該モールド被覆用の材料としてフッ素ポリマー系の
絶縁物が用いられる、特許請求の範囲第１項記載の交流
放電管。[Claims] 1. At least one pair or more of electrodes are provided on the outer surface of a dielectric pipe, and at least the ends of the electrodes along the longitudinal direction of each electrode are molded and covered with an insulating material. Characteristic AC discharge tube. 2. The AC discharge tube according to claim 1, wherein a silicone polymer insulator is used as the mold coating material. 3. The AC discharge tube according to claim 1, wherein a fluoropolymer insulator is used as the material for the mold coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24321086A JPS6398163A (en) | 1986-10-15 | 1986-10-15 | Ac discharge tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24321086A JPS6398163A (en) | 1986-10-15 | 1986-10-15 | Ac discharge tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6398163A true JPS6398163A (en) | 1988-04-28 |
Family
ID=17100465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24321086A Pending JPS6398163A (en) | 1986-10-15 | 1986-10-15 | Ac discharge tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6398163A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5172389A (en) * | 1989-02-07 | 1992-12-15 | Matsushita Electric Industrial Co., Ltd. | Gas laser apparatus |
| WO1993003520A1 (en) * | 1991-07-29 | 1993-02-18 | Fanuc Ltd | Discharge tube for laser |
| US5514934A (en) * | 1991-05-31 | 1996-05-07 | Mitsubishi Denki Kabushiki Kaisha | Discharge lamp, image display device using the same and discharge lamp producing method |
| JP2007026798A (en) * | 2005-07-14 | 2007-02-01 | Matsushita Electric Ind Co Ltd | External electrode electric discharge lamp and backlight unit |
| WO2007132543A1 (en) * | 2006-05-12 | 2007-11-22 | Sharp Kabushiki Kaisha | Cold cathode lamp, illuminating device for display comprising same, and display |
| WO2007132542A1 (en) * | 2006-05-12 | 2007-11-22 | Sharp Kabushiki Kaisha | Cold cathode lamp, illuminating device for display comprising same, and display |
| JP2008234887A (en) * | 2007-03-19 | 2008-10-02 | Ushio Inc | External-electrode rare-gas fluorescent lamp |
| JP2010123272A (en) * | 2008-11-17 | 2010-06-03 | Orc Mfg Co Ltd | Excimer lamp |
| US7800308B2 (en) | 2007-08-31 | 2010-09-21 | Ushio Denki Kabushiki Kaisha | Excimer lamp |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6324686A (en) * | 1986-07-17 | 1988-02-02 | Komatsu Ltd | Gas laser |
-
1986
- 1986-10-15 JP JP24321086A patent/JPS6398163A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6324686A (en) * | 1986-07-17 | 1988-02-02 | Komatsu Ltd | Gas laser |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5172389A (en) * | 1989-02-07 | 1992-12-15 | Matsushita Electric Industrial Co., Ltd. | Gas laser apparatus |
| US5514934A (en) * | 1991-05-31 | 1996-05-07 | Mitsubishi Denki Kabushiki Kaisha | Discharge lamp, image display device using the same and discharge lamp producing method |
| WO1993003520A1 (en) * | 1991-07-29 | 1993-02-18 | Fanuc Ltd | Discharge tube for laser |
| US5379316A (en) * | 1991-07-29 | 1995-01-03 | Fanuc Ltd. | Laser discharge tube |
| JP2007026798A (en) * | 2005-07-14 | 2007-02-01 | Matsushita Electric Ind Co Ltd | External electrode electric discharge lamp and backlight unit |
| JP4559926B2 (en) * | 2005-07-14 | 2010-10-13 | パナソニック株式会社 | External electrode type discharge lamp and backlight unit |
| WO2007132542A1 (en) * | 2006-05-12 | 2007-11-22 | Sharp Kabushiki Kaisha | Cold cathode lamp, illuminating device for display comprising same, and display |
| WO2007132543A1 (en) * | 2006-05-12 | 2007-11-22 | Sharp Kabushiki Kaisha | Cold cathode lamp, illuminating device for display comprising same, and display |
| US8030859B2 (en) | 2006-05-12 | 2011-10-04 | Sharp Kabushiki Kaisha | Cold-cathode lamp, and display illumination device and display device therewith |
| US8080941B2 (en) | 2006-05-12 | 2011-12-20 | Sharp Kabushiki Kaisha | Cold cathode lamp, and illumination device for display device and display device provided therewith |
| JP2008234887A (en) * | 2007-03-19 | 2008-10-02 | Ushio Inc | External-electrode rare-gas fluorescent lamp |
| US7800308B2 (en) | 2007-08-31 | 2010-09-21 | Ushio Denki Kabushiki Kaisha | Excimer lamp |
| JP2010123272A (en) * | 2008-11-17 | 2010-06-03 | Orc Mfg Co Ltd | Excimer lamp |
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