JPS6398164A - Ac discharge tube - Google Patents
Ac discharge tubeInfo
- Publication number
- JPS6398164A JPS6398164A JP24321386A JP24321386A JPS6398164A JP S6398164 A JPS6398164 A JP S6398164A JP 24321386 A JP24321386 A JP 24321386A JP 24321386 A JP24321386 A JP 24321386A JP S6398164 A JPS6398164 A JP S6398164A
- Authority
- JP
- Japan
- Prior art keywords
- discharge tube
- electrodes
- pipe
- plating layer
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims abstract description 23
- 239000004020 conductor Substances 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 abstract description 3
- 239000010453 quartz Substances 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0385—Shape
- H01S3/0387—Helical shape
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は交流放電管に関し、特に所定の周波数（無線周
波数を含む）の交流電源を駆動電源とするガスレーザ放
電管に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an AC discharge tube, and more particularly to a gas laser discharge tube whose driving power is an AC power source of a predetermined frequency (including radio frequency).
一般に交流放電管は誘電体のパイプ（例えばセラミック
管あるいは石英管）の外表面に少くとも１対以上の電極
をそなえ、該電極間に所定周波数の交流電源を印加して
該放電管内のガス媒質を励起し、所定の放電が行われる
。なおこの場合、該誘電体は該交流電源に対し容量性の
インピーダンスとして作用し該電極間に所定の放電電流
が流れる。Generally, an AC discharge tube has at least one pair of electrodes on the outer surface of a dielectric pipe (for example, a ceramic tube or a quartz tube), and an AC power source of a predetermined frequency is applied between the electrodes to control the gas medium inside the discharge tube. is excited, and a predetermined discharge occurs. In this case, the dielectric acts as a capacitive impedance with respect to the AC power source, and a predetermined discharge current flows between the electrodes.
この場合、該電極を形成する手段として通常は所定のマ
スクを用いてメッキ層を形成するかあるいは金属テープ
を接着するなどの手段が用いられている。In this case, the electrodes are usually formed by forming a plating layer using a predetermined mask or by bonding a metal tape.
しかしながら該電極としてメッキ層を用いる場合には、
該メッキ層を十分な厚さに形成することが困難であり（
通常数１０ミクロンの範囲である）、そのために大電流
を流すことができず、また該メッキ層がはがれてしまう
（特に該メッキ層に接続された端子に力が加わったよ
うな場合）などの問題点がある。一方、該電極として金
属テープを接着した場合には、熱に弱く、発熱に対して
十分に耐えることができないという問題点がある。However, when using a plating layer as the electrode,
It is difficult to form the plating layer to a sufficient thickness (
(usually in the range of several tens of microns), therefore, large currents cannot be passed, and the plating layer may peel off (especially when force is applied to the terminal connected to the plating layer). There is a problem. On the other hand, when a metal tape is bonded as the electrode, there is a problem that it is weak against heat and cannot sufficiently withstand heat generation.
なお従来より該１対の電極を誘電体パイプの外表面に形
成する場合、該外表面の長さ方向に沿って直線状に形成
する場合以外に、該１対の電極を互に交叉しないように
それぞれ螺旋状に形成することによって（例えば金属テ
ープを螺旋状に巻いて各電極を形成する）、該放電管内
の放電密度をその長さ方向からみて均一にすることも行
われている。Conventionally, when forming the pair of electrodes on the outer surface of a dielectric pipe, other than when forming the electrodes in a straight line along the length of the outer surface, it is necessary to prevent the pair of electrodes from crossing each other. It is also possible to make the discharge density in the discharge tube uniform in the longitudinal direction by forming each electrode in a spiral shape (for example, by winding a metal tape in a spiral shape to form each electrode).
本発明は、この種の交流放電管の電極（直線状あるいは
螺旋状に形成された電極）を、メッキ層あるいは金属テ
ープのみで単独に形成した場合の各問題点を解決し、大
電流を流すことが可能となり、容易にはがれることもな
く、しかも熱に対しても強い電極を提供するようにした
ものである。The present invention solves various problems when the electrodes (linear or spiral electrodes) of this type of AC discharge tube are formed solely from a plating layer or metal tape, and allows large current to flow. This makes it possible to provide an electrode that does not peel off easily and is resistant to heat.
かかる問題点を解決するために、本発明においては、誘
電体のパイプの外表面に少くとも１対以上（３相の場合
は３個）の電極をそなえ、該電極が該パイプの外表面上
に形成されたメッキ層と、該メッキ層上に形成された導
電体とにより構成されている、交流放電管が提供される
。In order to solve this problem, in the present invention, at least one pair or more (three in the case of three phases) of electrodes are provided on the outer surface of the dielectric pipe, and the electrodes are provided on the outer surface of the pipe. An AC discharge tube is provided that includes a plating layer formed on the plating layer and a conductor formed on the plating layer.
上記構成によれば、交流放電管の電極として大電流を流
すことが可能になり、容易にはがれることもなく、しか
も熱に対しても強くなるという、上記交流放電管の電極
に対しての各要求をすべてみたした電極をうろことがで
きる。According to the above configuration, each of the electrodes for the AC discharge tube is capable of passing a large current through the electrodes of the AC discharge tube, does not peel off easily, and is resistant to heat. You can find electrodes that meet all your needs.
第１図は、本発明の１実施例としての交流放電管の構成
を示すもので、１は誘電体のパイプ（例えばセラミック
管または石英管など）、２．２’は該誘電体のパイプ外
表面に形成される１対の電極の内側層としてパイプ外表
面に直接形成されるメッキ層、３．３′は該１対の電極
の外側層となる導電体であって、該第１図に示される実
施例においては該導電体３．３′がそれぞれワイヤによ
って構成され、該メッキ層２，２′上に所定の強度を付
与するように巻き付けられる。次いで該巻回されたワイ
ヤ３．３′を該メッキ層２．２′に対してハンダ付処理
（図中、符号４．４′で示す）する。なお第１図ではほ
ぼ円筒状の放電管が示されているが、該放電管の断面形
状を多角形としてもよい。FIG. 1 shows the configuration of an AC discharge tube as an embodiment of the present invention, in which 1 is a dielectric pipe (for example, a ceramic tube or a quartz tube), and 2.2' is an outside of the dielectric pipe. A plating layer 3.3' is formed directly on the outer surface of the pipe as an inner layer of a pair of electrodes formed on the surface, and 3.3' is a conductor that becomes an outer layer of the pair of electrodes. In the embodiment shown, the electrical conductors 3, 3' are each constituted by a wire, which is wound onto the plated layers 2, 2' in such a way as to provide a certain strength. Next, the wound wire 3.3' is soldered to the plated layer 2.2' (indicated by reference numeral 4.4' in the figure). Although FIG. 1 shows a substantially cylindrical discharge tube, the cross-sectional shape of the discharge tube may be polygonal.
この場合、上記導電体３．３’ （上記実施例ではワ
イヤ）と誘電体のパイプ１との間にはメッキ［２、２’
が介在されているので、該電極と誘電体との間にギャッ
プが形成されるおそれがなく、したがって該ギャップ内
に発生する高電界にもとづく絶縁破壊を起すこともなく
なる。In this case, there is a plating [2, 2'
Since there is a gap between the electrode and the dielectric, there is no possibility of a gap being formed between the electrode and the dielectric, and therefore, there is no possibility of dielectric breakdown due to the high electric field generated within the gap.
このように本発明にかかる交流放電管の電極は、該誘電
体の外表面上に直接メッキ層を形成し、その上部に導電
体（上記実施例ではワイヤが巻付けられる）が形成され
るので、該メッキ層自体が薄くても大電流を流すことが
可能であり、該ワイヤに接続された電流端子に力が加わ
っても容易にはがれることがなく、熱に対しても強いと
いう、上述した要求をすべてみたした電極をうろことが
できる。In this way, in the electrode of the AC discharge tube according to the present invention, a plating layer is formed directly on the outer surface of the dielectric, and a conductor (in the above embodiment, a wire is wound) is formed on top of the plating layer. As mentioned above, even if the plating layer itself is thin, it is possible to flow a large current, it will not peel off easily even if force is applied to the current terminal connected to the wire, and it is resistant to heat. You can find electrodes that meet all your needs.
なお上記実施例では１対の電極が互に交叉しないように
螺旋状に形成されている（これによって上述したように
管内における放電密度の不均一を防ぎ、長手方向からみ
た放電密度の均一性が確保できる）が、これら１対の電
極（メッキ層と導電体からなる）を該誘電体パイプの長
手方向に沿って互に対向するように直線状に形成するこ
とも勿論可能である。In the above embodiment, the pair of electrodes is formed in a spiral shape so that they do not cross each other (this prevents uneven discharge density within the tube as described above, and improves the uniformity of discharge density in the longitudinal direction. Of course, it is also possible to form the pair of electrodes (consisting of a plating layer and a conductor) linearly so as to face each other along the longitudinal direction of the dielectric pipe.
また上記実施例では該導電体として該メッキ層上にワイ
ヤを巻付けるようにしているが、該ワイヤの代りに該メ
ッキ層上に金属テープを巻付けるなどの手段をとりうろ
ことも明らかである。Further, in the above embodiment, a wire is wound around the plating layer as the conductor, but it is obvious that a means such as a metal tape can be wound around the plating layer instead of the wire.
このように導電体を形成する手段として上述したように
ワイヤ又はテープを巻付けることによって、その作業性
も容易になるものである。By winding the wire or tape as described above as a means for forming the conductor, the workability is also facilitated.
なお本発明の電極をそなえた放電管は、所定周波数（無
線周波数を含む）の交流電源により駆動されるガスレー
ザ放電管として好適に使用しうろことは上述したとおり
である。また本発明は炭酸ガスレーザのみならず、Ｈｅ
−Ｎｅ、Ｇｏ（−酸化炭素）。As described above, the discharge tube equipped with the electrode of the present invention can be suitably used as a gas laser discharge tube driven by an AC power source of a predetermined frequency (including radio frequency). Furthermore, the present invention is applicable not only to carbon dioxide lasers but also to He
-Ne, Go (-carbon oxide).
エキシマ等の他の全てのガスレーザに適用することが可
能である。It is possible to apply to all other gas lasers such as excimer.
本発明によれば、交流放電管の電極として、大電流を流
すことが可能であり、容易にはがれることもなく、しか
も熱に対しても強く、かつ絶縁耐力も高い電橋をうろこ
とができる。According to the present invention, as an electrode for an AC discharge tube, it is possible to flow a large current, it does not peel off easily, is resistant to heat, and has high dielectric strength and can be used to move around electric bridges. .
第１図は、本発明の１実施例としての交流放電管の斜視
図、
第２図は、第１図に示される交流放電管の横断面図であ
る。
（符号の説明）
１・・・誘電体のパイプ、 ２，２′・・・メッキ層
、３．３′・・・導電体（ワイヤ）、
４．４′・・・ハンダ付部。FIG. 1 is a perspective view of an AC discharge tube as an embodiment of the present invention, and FIG. 2 is a cross-sectional view of the AC discharge tube shown in FIG. 1. (Explanation of symbols) 1... Dielectric pipe, 2, 2'... Plating layer, 3.3'... Conductor (wire), 4.4'... Soldering part.
Claims (1)
をそなえ、該電極が該パイプの外表面上に形成されたメ
ッキ層と、該メッキ層上に形成された導電体とにより構
成されることを特徴とする交流放電管。 ２、該電極が該パイプの外表面上に直線状に形成されて
いる、特許請求の範囲第１項記載の交流放電管。 ３、該電極が該パイプの外表面上に螺旋状に形成されて
いる、特許請求の範囲第１項記載の交流放電管。 ４、該導電体がワイヤによって形成されている特許請求
の範囲第１項記載の交流放電管。 ５、該導電体が金属テープによって形成されている、特
許請求の範囲第１項記載の交流放電管。 ６、該放電管の断面形状が多角形である、特許請求の範
囲第１項から第５項までのいづれか１項に記載の交流放
電管。[Claims] 1. At least one or more pairs of electrodes are provided on the outer surface of a dielectric pipe, and the electrodes include a plating layer formed on the outer surface of the pipe and a plating layer formed on the plating layer. 1. An AC discharge tube comprising: a conductor; 2. The AC discharge tube according to claim 1, wherein the electrode is formed linearly on the outer surface of the pipe. 3. The AC discharge tube according to claim 1, wherein the electrode is spirally formed on the outer surface of the pipe. 4. The AC discharge tube according to claim 1, wherein the conductor is formed of a wire. 5. The AC discharge tube according to claim 1, wherein the conductor is formed of a metal tape. 6. The AC discharge tube according to any one of claims 1 to 5, wherein the discharge tube has a polygonal cross-sectional shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24321386A JPS6398164A (en) | 1986-10-15 | 1986-10-15 | Ac discharge tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24321386A JPS6398164A (en) | 1986-10-15 | 1986-10-15 | Ac discharge tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6398164A true JPS6398164A (en) | 1988-04-28 |
Family
ID=17100508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24321386A Pending JPS6398164A (en) | 1986-10-15 | 1986-10-15 | Ac discharge tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6398164A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006244780A (en) * | 2005-03-01 | 2006-09-14 | Harison Toshiba Lighting Corp | Outer face electrode fluorescent lamp and lighting device |
| US20100086000A1 (en) * | 2007-04-27 | 2010-04-08 | Trumpf Laser- Und Systemtechnik Gmbh | Laser Discharge Tube Assembly for a Gas Laser and Production Method for the Same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6393179A (en) * | 1986-10-08 | 1988-04-23 | Komatsu Ltd | Discharge tube for laser oscillator |
-
1986
- 1986-10-15 JP JP24321386A patent/JPS6398164A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6393179A (en) * | 1986-10-08 | 1988-04-23 | Komatsu Ltd | Discharge tube for laser oscillator |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006244780A (en) * | 2005-03-01 | 2006-09-14 | Harison Toshiba Lighting Corp | Outer face electrode fluorescent lamp and lighting device |
| US20100086000A1 (en) * | 2007-04-27 | 2010-04-08 | Trumpf Laser- Und Systemtechnik Gmbh | Laser Discharge Tube Assembly for a Gas Laser and Production Method for the Same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH06112058A (en) | Step-up transformer | |
| JPS6398164A (en) | Ac discharge tube | |
| CA1172741A (en) | Te laser amplifier | |
| US3515846A (en) | Arc-welding electrodes and welding method using the same | |
| JPH08203739A (en) | Air-core coil device | |
| US4800567A (en) | High-frequency-discharge excited gas laser | |
| JP2002313646A (en) | Winding-type common mode choke coil | |
| JPH02207578A (en) | Gas laser oscillator | |
| JP2001334147A (en) | Device and method for plasma treatment | |
| JPS62174990A (en) | High-frequency excitation coaxial co2 laser | |
| JPH06203810A (en) | Electrodeless fluorescent lamp | |
| JPS61166013A (en) | Coil body | |
| JPH06119827A (en) | Litz wire | |
| JP2003324018A (en) | Common mode choke coil | |
| JP2003151834A (en) | Winding structure of transformer | |
| JP2627650B2 (en) | Flat type resistor and its lead terminal bonding | |
| JP3052541B2 (en) | Current limiting element | |
| JP2525756B2 (en) | Step-up transformer | |
| KR100188644B1 (en) | Ozonizer | |
| JPH01154577A (en) | Discharge excitation type short pulse laser | |
| JPS6358884A (en) | Silent discharge type gas laser device | |
| BG62541B1 (en) | Transformer winding for electric resistance welding | |
| JPS617676A (en) | Electrode for gas laser oscillator | |
| JPH07230885A (en) | Electrodeless discharge lamp lighting device | |
| JP2003068530A (en) | Inductance part, and its manufacturing method |