JPS6397231U - - Google Patents
Info
- Publication number
- JPS6397231U JPS6397231U JP19222586U JP19222586U JPS6397231U JP S6397231 U JPS6397231 U JP S6397231U JP 19222586 U JP19222586 U JP 19222586U JP 19222586 U JP19222586 U JP 19222586U JP S6397231 U JPS6397231 U JP S6397231U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- substrate
- reaction vessel
- light
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000009434 installation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19222586U JPS6397231U (ko) | 1986-12-13 | 1986-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19222586U JPS6397231U (ko) | 1986-12-13 | 1986-12-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6397231U true JPS6397231U (ko) | 1988-06-23 |
Family
ID=31147101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19222586U Pending JPS6397231U (ko) | 1986-12-13 | 1986-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6397231U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014051331A1 (ko) * | 2012-09-26 | 2014-04-03 | (주)비엠씨 | 플라즈마 화학 기상 증착 장치 |
-
1986
- 1986-12-13 JP JP19222586U patent/JPS6397231U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014051331A1 (ko) * | 2012-09-26 | 2014-04-03 | (주)비엠씨 | 플라즈마 화학 기상 증착 장치 |
| JP2015535889A (ja) * | 2012-09-26 | 2015-12-17 | ビーエムシー カンパニー リミテッド | プラズマ化学気相蒸着装置 |