JPS61202444U - - Google Patents
Info
- Publication number
- JPS61202444U JPS61202444U JP8547185U JP8547185U JPS61202444U JP S61202444 U JPS61202444 U JP S61202444U JP 8547185 U JP8547185 U JP 8547185U JP 8547185 U JP8547185 U JP 8547185U JP S61202444 U JPS61202444 U JP S61202444U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- processing apparatus
- reaction chamber
- plasma processing
- plasma gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8547185U JPS61202444U (ko) | 1985-06-05 | 1985-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8547185U JPS61202444U (ko) | 1985-06-05 | 1985-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61202444U true JPS61202444U (ko) | 1986-12-19 |
Family
ID=30635898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8547185U Pending JPS61202444U (ko) | 1985-06-05 | 1985-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61202444U (ko) |
-
1985
- 1985-06-05 JP JP8547185U patent/JPS61202444U/ja active Pending