JPS6396231A - Lead frame material combining high strength with high electric conductivity - Google Patents
Lead frame material combining high strength with high electric conductivityInfo
- Publication number
- JPS6396231A JPS6396231A JP24025786A JP24025786A JPS6396231A JP S6396231 A JPS6396231 A JP S6396231A JP 24025786 A JP24025786 A JP 24025786A JP 24025786 A JP24025786 A JP 24025786A JP S6396231 A JPS6396231 A JP S6396231A
- Authority
- JP
- Japan
- Prior art keywords
- lead frame
- solder
- strength
- frame material
- electric conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims abstract description 28
- 229910000679 solder Inorganic materials 0.000 claims abstract description 24
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910000881 Cu alloy Inorganic materials 0.000 abstract description 12
- 229910045601 alloy Inorganic materials 0.000 abstract description 12
- 239000000956 alloy Substances 0.000 abstract description 12
- 239000010949 copper Substances 0.000 abstract description 5
- 229910052726 zirconium Inorganic materials 0.000 abstract description 4
- 229910052804 chromium Inorganic materials 0.000 abstract description 3
- 239000011800 void material Substances 0.000 abstract description 3
- 229910052725 zinc Inorganic materials 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 239000000853 adhesive Substances 0.000 abstract 2
- 230000001070 adhesive effect Effects 0.000 abstract 2
- 238000007747 plating Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000001000 micrograph Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910017526 Cu-Cr-Zr Inorganic materials 0.000 description 2
- 229910017810 Cu—Cr—Zr Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000005097 cold rolling Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002747 voluntary effect Effects 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 229910017813 Cu—Cr Inorganic materials 0.000 description 1
- HEFNNWSXXWATRW-UHFFFAOYSA-N Ibuprofen Chemical compound CC(C)CC1=CC=C(C(C)C(O)=O)C=C1 HEFNNWSXXWATRW-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910021538 borax Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004328 sodium tetraborate Substances 0.000 description 1
- 235000010339 sodium tetraborate Nutrition 0.000 description 1
- 238000009864 tensile test Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Conductive Materials (AREA)
- Lead Frames For Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は高強度、高導電性リードフレーム材料に関し、
さらに詳しくは、高強度、高導電性でめっきされた錫お
よび/またははんだの密着性に優れた半導体に使用され
るリードフレーム材料に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a high strength, highly conductive lead frame material,
More specifically, the present invention relates to a lead frame material used for semiconductors having high strength, high conductivity, and excellent adhesion to tin plated and/or solder.
[従来技術]
従来、半導体用リードフレーム材料としては、素子およ
びセラミックスと線膨張係数が近似し、さらに、高い強
度を有する42合金が多く使用されてきている。[Prior Art] Conventionally, 42 alloy, which has a linear expansion coefficient similar to that of elements and ceramics and also has high strength, has been widely used as lead frame materials for semiconductors.
しかし、最近になって素子の接着技術および封着材の改
善に伴い42合金に代わり、熱放散性に優れている銅系
材料が使用されるようになってきた。However, recently, with improvements in device bonding technology and sealing materials, copper-based materials with excellent heat dissipation properties have come to be used instead of 42 alloy.
特に、集積回路用リードフレーム材料には、最近の高集
積化の傾向から、素子で発生するジュール熱を効率よく
放散させるために、より熱伝導性(即ち、導電性)の高
いリードフレーム材料が求められており、導電率で70
%IACS以上の要求が出されている。In particular, lead frame materials for integrated circuits have higher thermal conductivity (i.e., electrical conductivity) in order to efficiently dissipate Joule heat generated in devices due to the recent trend toward higher integration. The conductivity is 70
A request greater than %IACS has been issued.
また、集積回路の高密度実装化に伴う集積回路の小型化
の傾向から、リードフレーム材料も薄板化し、より高い
強度も同時に求められ、従って、高い導電性と共に42
合金と同様の高い強度も併せ備えた銅系材料がリードフ
レーム材料として要求されている。In addition, due to the trend toward miniaturization of integrated circuits due to the high density packaging of integrated circuits, lead frame materials are becoming thinner and higher strength is required at the same time.
Copper-based materials that also have high strength similar to alloys are required as lead frame materials.
そして、上記のように高い導電性と高い強度を併せ備え
る銅合金としてはCu−Cr−Zr系合金が知られてい
る。しかし、この合金はCrおよびZrが析出すること
によりマトリックスの有する高い導電性を損なうことな
(高い強度を出現させたものであり、強度と導電性に関
しては上記の条件を満足するが、この合金はめっきされ
た錫および/またははんだの密着性に劣るという間麗か
ある。即ち、錫またははんだめっき(溶融めっきまたは
電解めっき)を行った後、150℃×1000時間の加
熱を行うと形成された合金層と母材の界面からめっきが
剥離するという問題がある。A Cu-Cr-Zr alloy is known as a copper alloy that has both high conductivity and high strength as described above. However, this alloy does not impair the high conductivity of the matrix due to the precipitation of Cr and Zr (it has high strength), and although it satisfies the above conditions in terms of strength and conductivity, this alloy The adhesion of plated tin and/or solder is poor.In other words, after tin or solder plating (hot-dip plating or electrolytic plating), it is formed when heated at 150°C for 1000 hours. There is a problem that the plating peels off from the interface between the alloy layer and the base material.
通常、リードフレームは外部リード部に錫またははんた
めっきを行って使用され、また、最近は完成した製品に
対し、バーンインテスト等の加熱をされる場合が増えて
いることから、150℃×1000時間の加熱によって
も錫および/またははんだめっきが剥離しないことが必
須の条件となっている。[発明が解決しようとする問題
点]本発明は上記に説明したように従来におけるリード
フレーム材料の間厘点に鑑み、本発明者が鋭意研究を行
った結果、Cu−Cr−Zr系合金の錫および/または
はんだめっきが加熱によっても剥離することがなく、錫
および/またははんだめっきの密着性にも優れた高強度
、導電率70%lAC3以上の高導電性のリードフレー
ム材料を開発したのである。Normally, lead frames are used with tin or solder plating on the external leads, and recently finished products are increasingly being heated for burn-in tests, etc. It is an essential condition that the tin and/or solder plating does not peel off even after 1000 hours of heating. [Problems to be Solved by the Invention] As explained above, in view of the shortcomings of conventional lead frame materials, the present inventor has conducted extensive research, and as a result, a Cu-Cr-Zr based alloy has been developed. We have developed a highly conductive lead frame material with high strength and conductivity of 70% lAC3 or higher, which does not cause the tin and/or solder plating to peel off even when heated, and has excellent adhesion to the tin and/or solder plating. be.
[問題点を解決するための手段]
本発明に係る高強度、高導電性リードフレーム材料の特
徴とするところは、
Cr 0.1〜0.8wt%、Z r 0.01〜0.
5wt%、Zn 0.05〜1.Owt%
を含有し、残部実質的にCuよりなる銅合金であり、導
電率70%lAC9以上を有し、かつ、めっきされた錫
および/またははんだの密着性が優れていることにある
。[Means for Solving the Problems] The high-strength, high-conductivity lead frame material according to the present invention has the following characteristics: Cr: 0.1-0.8wt%, Zr: 0.01-0.
5wt%, Zn 0.05-1. It is a copper alloy containing 50% Cu and the remainder substantially Cu, has an electrical conductivity of 70%lAC9 or more, and has excellent adhesion to plated tin and/or solder.
本発明に係る高強度、高導電性リードフレーム材料につ
いて以下詳細に説明する。The high-strength, highly conductive lead frame material according to the present invention will be described in detail below.
先ず、本発明に係る高強度、高導電性リードフレーム材
料の含有成分および含有割合について説明する。First, the components and content ratios of the high-strength, high-conductivity lead frame material according to the present invention will be explained.
Crは強度を付与する元素であり、熱処理を行うことに
より析出して強度および導電率を向上させ・含有量が0
.1wt5未満では強度向上効果(よ少なく、また、0
.8wt%を越えて含有されると多量に析出したCrは
リードフレームをエツチングにり加工する場合にエツチ
ングされずに残り、リードフレームの表面にウィスカ一
様の突起物となって現れ、使用上問題となることが起こ
る可能性があり、かつ、Cr含有量に比例して導電率が
低下するため強度向上のに必要な量以上に含有させるこ
とは好ましくない。よって、Cr含有量は0.1〜0.
8wt%とする。Cr is an element that imparts strength, and it precipitates through heat treatment to improve strength and conductivity.
.. If it is less than 1wt5, the strength improvement effect (very little, or 0
.. If the content exceeds 8wt%, a large amount of precipitated Cr will remain unetched when the lead frame is etched, and will appear as whisker-like protrusions on the surface of the lead frame, causing problems in use. This may occur, and the conductivity decreases in proportion to the Cr content, so it is not preferable to contain more than the amount necessary to improve the strength. Therefore, the Cr content is 0.1 to 0.
It is set to 8wt%.
ZrはCrと共に析出し強度向上に効果を有する元素で
あり、含有量がo、otwt%未満ではこの効果は少な
く、また、0.5vt%を越えて含有されると造塊を困
難にする。よって、Zr含有量は0.01〜0.5冑t
%とする。Zr is an element that is effective in improving precipitation strength together with Cr, and if the content is less than o, otwt%, this effect is small, and if the content is more than 0.5vt%, it becomes difficult to form ingots. Therefore, the Zr content is 0.01 to 0.5 tons
%.
Znはめっきされた錫および/またははんだの密着性の
改簿に寄与する元素である。即ち、第2図のZnを含ま
ない銅合金にはんだを溶融めっき後、150°Cの温度
で1000時間加熱後の接合界面の金属組織の顕微鏡写
真に示すように、Znを含まないCu−Cr−Zr系銅
合金4の母材とめっきされたはんだ(または錫)lとの
界面2に合金層および多数のボイドを形成して剥離する
。このボイドはカーケンダール効果によるものと考えら
れるが、第1図に示すように第2図と同様の加熱後の接
合界面の金属組織の顕微鏡写真に示すように、Znを含
有するCu−0r−Zr系銅合金4の母材とはんだめっ
き1との界面に合金層は形成されるが、ボイドの形成は
防止され、剥離は生じない。そして、含有量が0.05
wt%未満では上記の効果は少なく、また、1.0wt
%を越えて含有されると上記の効果はあるが、導電率が
低下し、70%lAC3以上を確保することができない
。よって、Zn含有量は0.05〜1 、 Ovt%と
する。Zn is an element that contributes to improving the adhesion of plated tin and/or solder. That is, as shown in the micrograph of the metal structure of the bonding interface after hot dipping solder on a copper alloy that does not contain Zn and heating it at a temperature of 150°C for 1000 hours in Figure 2, Cu-Cr that does not contain Zn. - An alloy layer and a large number of voids are formed at the interface 2 between the base material of the Zr-based copper alloy 4 and the plated solder (or tin) 1, and then peeled off. This void is thought to be due to the Kirkendahl effect, but as shown in Figure 1, which is a micrograph of the metal structure of the bonding interface after heating similar to Figure 2, Cu-Or-Zr containing Zn. Although an alloy layer is formed at the interface between the base material of copper alloy 4 and solder plating 1, the formation of voids is prevented and peeling does not occur. And the content is 0.05
Below wt%, the above effect is small, and 1.0wt%
If the content exceeds 70% lAC3, the above effect will be obtained, but the conductivity will decrease and it will not be possible to secure 70%lAC3 or more. Therefore, the Zn content is set to 0.05 to 1 Ovt%.
[実 施 例]
次に、本発明に係る高強度、高伝導性リードフレーム材
料の実施例を説明する。[Example] Next, an example of the high-strength, high-conductivity lead frame material according to the present invention will be described.
実施例
第1表に示す含有成分および含有割合の銅合金をクリプ
トル炉を使用し、硼砂被覆下において大気中で溶解し、
鋳鉄製のブックモールドを用いて50mmtX 70m
mwx 200mm1の鋳塊を鋳造した。Example A copper alloy having the components and proportions shown in Table 1 was melted in the air under a borax coating using a Kryptor furnace.
50mmtX 70m using cast iron book mold
An ingot with a mwx of 200 mm was cast.
この鋳塊の表裏両面を5mmずつ開削後、900°Cの
温度で10mmtまで熱間圧延した後、水冷し、スケー
ルを除去後、1 、0 mmtまで冷間圧延した後、N
o、1は400℃、他のものは450℃の温度で4時間
の時効した。さらに、0.25mmtまで冷間圧延した
後、硝石炉を用い350〜400℃の温度で20秒間の
焼鈍を行った。After cutting both the front and back sides of this ingot by 5 mm, hot rolling at a temperature of 900°C to a thickness of 10 mm, cooling with water to remove scale, and cold rolling to a thickness of 1.0 mm.
o.1 was aged at 400°C, and the others were aged at 450°C for 4 hours. Furthermore, after cold rolling to 0.25 mmt, annealing was performed for 20 seconds at a temperature of 350 to 400°C using a saltpetre furnace.
これらの試料について下記の試験を行い、その結果を第
2表に示す。The following tests were conducted on these samples, and the results are shown in Table 2.
(1)引張試験は圧延方向に平行に切り出したJIS1
3号B試験号令試験片。(1) The tensile test was performed using JIS1 cut parallel to the rolling direction.
No. 3 B test number test piece.
(2)導電率は10wX3001の試験片を用いダブル
ブリッジにより測定した。(2) Electrical conductivity was measured by double bridge using a 10w×3001 test piece.
(3)繰り返し曲げ性は0.5mm幅のリードをプレス
で打ち抜いたものを試験片とし、227gの錘りを一端
に吊して一方向往復90°曲げを行い、破断までの回数
を往復を1回と数え、試験片数5の平均値として求めた
。曲げ軸は圧延方向と直角とした。(3) Repeated bendability is determined by using a 0.5 mm wide lead punched out with a press as a test piece, hanging a 227 g weight at one end, bending it back and forth in one direction by 90°, and measuring the number of times until breakage. It was counted as one test and was calculated as the average value of 5 test pieces. The bending axis was perpendicular to the rolling direction.
(4)はんだの密着性は弱活性フラックスを用い、23
0℃の温度の5n60−Pb40のはんだ浴で溶融はん
だめっきした試験片を150℃の温度で1000時間保
持した後、90°曲げ戻しを行い、剥離の有無を調べた
。(4) For solder adhesion, use weakly activated flux, 23
A test piece plated with molten solder in a 5n60-Pb40 solder bath at a temperature of 0°C was held at a temperature of 150°C for 1000 hours, then bent back by 90° and examined for peeling.
第2表から明らかなように本発明に係る高強度、高導電
性リードフレーム材料のNo、1〜4は高い引張強さ、
優れた繰り返し曲げ性および70%IACS以上の導電
率を有し、さらに、Znを含有していない或いはZn含
有量の低い比較例5および6が150℃の温度で100
0時間の加熱によりはんだが剥離しているのに対し、Z
nを適量含有しているため剥離が防止されていることが
わかる。As is clear from Table 2, Nos. 1 to 4 of the high-strength, high-conductivity lead frame materials according to the present invention have high tensile strength;
Comparative Examples 5 and 6, which have excellent repeated bendability and electrical conductivity of 70% IACS or higher, and which do not contain Zn or have a low Zn content, have a 100%
While the solder peeled off after heating for 0 hours, Z
It can be seen that peeling is prevented because an appropriate amount of n is contained.
第1表
[発明の効果]
以上説明したように、本発明に係る高強度、高導電性リ
ードフレーム材料は上記の構成であるから、高い強度と
70%IACS以上の高い導電性を有し、さらに、めっ
きされた錫、はんだの密着性に優れるという効果を有し
ている。Table 1 [Effects of the Invention] As explained above, the high-strength, high-conductivity lead frame material according to the present invention has the above structure, so it has high strength and high conductivity of 70% IACS or higher. Furthermore, it has the effect of excellent adhesion between plated tin and solder.
第1図は第1表のNO34の本発明に係る高強度、高導
電性リードフレーム材料の銅合金にはんだを溶融めっき
した後、150℃の温度で1000時間加熱した後の接
合界面の金属組織の顕微鏡写真、第2図は第1表のN0
95の比較例の銅合金にはんだを溶融めっきした後、第
1図と同様の処理をした後の接合界面の金属組織の顕微
鏡写真である。
1〜はんだ層、2〜合金層、3〜ボイド、4〜母材(銅
合金)。
手続補正書(自発)
昭和61年I■月06日
1、事件の表示
昭和61年特許願第240257号
2、発明の名称
高強度、高導電性リードフレーム材料
3、補正をする者
事件との関係 特許出願人
住所 神戸市中央区脇浜町1丁目3番18号名称 (1
19) 株式会社 神戸製鋼所藤和東陽町コープ90
1号
5、補正命令の日付 (自発)
6、補正の対象
第1図、第2図
7、補正の内容
別紙の通りFigure 1 shows the metal structure of the bonding interface after melt-plating the copper alloy of NO34 in Table 1, which is a high-strength, high-conductivity lead frame material according to the present invention, with solder and then heating it at a temperature of 150°C for 1000 hours. Micrograph of , Figure 2 is N0 in Table 1.
2 is a microscopic photograph of the metal structure of the bonding interface after the copper alloy of Comparative Example No. 95 was hot-dipped with solder and then subjected to the same treatment as in FIG. 1. 1 - solder layer, 2 - alloy layer, 3 - void, 4 - base material (copper alloy). Procedural amendment (voluntary) I■ Month 06, 1985 1, Indication of case 1988 Patent Application No. 240257 2, Name of invention High strength, high conductive lead frame material 3, Person making the amendment Related Patent Applicant Address 1-3-18 Wakihama-cho, Chuo-ku, Kobe Name (1
19) Kobe Steel, Ltd. Fujiwa Toyocho Co-op 90
No. 1 5. Date of amendment order (voluntary) 6. Subject of amendment Figure 1, Figure 2 7. Details of amendment as attached.
Claims (1)
%、Zn0.05〜1.0wt% を含有し、残部実質的にCuよりなる銅合金であり、導
電率70%IACS以上を有し、かつ、めっきされた錫
および/またははんだの密着性が優れていることを特徴
とする高強度、高導電性リードフレーム材料。[Claims] Cr0.1-0.8wt%, Zr0.01-0.5wt
%, Zn0.05 to 1.0 wt%, the remainder being substantially Cu, and has an electrical conductivity of 70% IACS or more, and has good adhesion to plated tin and/or solder. High-strength, high-conductivity lead frame material characterized by superior properties.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24025786A JPS6396231A (en) | 1986-10-09 | 1986-10-09 | Lead frame material combining high strength with high electric conductivity |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24025786A JPS6396231A (en) | 1986-10-09 | 1986-10-09 | Lead frame material combining high strength with high electric conductivity |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6396231A true JPS6396231A (en) | 1988-04-27 |
Family
ID=17056798
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24025786A Pending JPS6396231A (en) | 1986-10-09 | 1986-10-09 | Lead frame material combining high strength with high electric conductivity |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6396231A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007100136A (en) * | 2005-09-30 | 2007-04-19 | Nikko Kinzoku Kk | Copper alloy for lead frame excellent in uniform plating property |
-
1986
- 1986-10-09 JP JP24025786A patent/JPS6396231A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007100136A (en) * | 2005-09-30 | 2007-04-19 | Nikko Kinzoku Kk | Copper alloy for lead frame excellent in uniform plating property |
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