JPS6394652A - Device for driving semiconductor holding head - Google Patents

Abstract

PURPOSE:To form an elevation driving motor in light weight and moreover in a small type, and to contrive to enhance responsibility of the driving mechanism without enlarging capacity of the motor by a method wherein a rotation driving motor and the elevation driving motor are installed in a fixation part, a turret head equipped with a collet attracting a pellet is pivotally supported by a support, the rotation driving motor and the turret head are linked by universal joints, and the elevation driving motor and the support are connected by a link mechanism rotatably supported by the fixation part. CONSTITUTION:When a rotation driving motor 4 rotates for a fixed amount, a turret head 5 is rotated. When an elevation driving motor 10 rotates clockwise, a disk 21 also rotates to the same direction, and a rod 22 is transferred to the left side. A lever 23 is rotated, a support 16 is transferred to the upper side through a bearing 17 by a roller 25, and the turret head 5 ascends also. At this time, the rotation of the rotation driving motor 4 is transmitted to the turret head 5 generating no hindrance according to action of universal joints 18, 19. When the elevation driving motor 10 rotates anticlockwise, the other end of the lever 23 descends, the support 16 is transferred to the lower side through a tension spring 26, and the turret head 5 also descends.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a device for driving a turret head that holds semi-integrated pellets.

[Conventional technology]

FIG. 3 is a longitudinal sectional view showing a conventional semiconductor holding head drive device, which is disclosed in, for example, Japanese Patent Application Laid-Open No. 59-220944, but which has a vertical drive mechanism added to its main parts.

In the figure, (1) is the base, (2) is the casing held so that it can move vertically (in the direction of arrow B) via the offset bearing (3), and +4Jh casing (2) is directly connected to the base (1).
), and (5) is a collet 1G that holds a semiconductor pellet (not shown) on its outer periphery.
+ is attached to the turret head, its shaft (7) is supported by the casing (2) via the bearing 18), and the shaft joint (
It is connected to a rotary drive electric motor 14) via a motor 9). tlCJ is a vertical drive electric motor fixed to the base (1), συ is a ball screw whose both ends are supported by the base (1), and is screwed into the casing (2). A2 is a toothed belt that transmits the rotation of the vertical drive electric motor (111) to the ball screw qll.

The conventional drive device for a semiconductor holding head is constructed as described above, and when the nine-rotation drive motor (4) rotates a predetermined amount, the turret head (5) rotates as shown by arrow A, and the collet (6) also rotates. Rotate. The tip of the collet (6) generates adsorption force by vacuum suction and adsorbs the semiconductor pellet. In this manner, the rotation of the turret head (5) serves to selectively replace the collets (6) on its outer periphery.

On the other hand, when the vertical drive motor shaft rotates, the ball screw aυ rotates via the belt α2, and the casing (2) screwed therewith moves vertically as shown by arrow B, and the turret head (5) also moves up and down. in this way,
The vertical movement of the turret head (5) serves to mount and bond semiconductor pellets onto a substrate (not shown).

[Problem that the invention seeks to solve]

This is because the conventional semiconductor holding head drive device as described above is configured to move the casing (2), which is screwed into the ball screw αυ, in the vertical direction.

The problem is that the vertical drive motor H needs to drive the entire casing (2) including the rotary drive motor 4), and the capacity of the vertical drive motor Ql becomes large, making the entire device large. There is a point.

This invention was made to solve the above problem, and the capacity of the vertical drive motor does not increase.

An object of the present invention is to provide a drive device for a semiconductor holding head that is lightweight, compact, and has good responsiveness.

[Means for solving problems]

The driving device for a semiconductor holding head according to the present invention includes a two-rotation drive motor and a vertical drive motor installed on a fixed part, and a turret head equipped with a collet for adsorbing pellets, which is pivoted on a support and rotated nine times. The driving electric motor and the turret head are connected by a universal joint, and the vertical driving electric motor and the support body are connected by a link mechanism pivotally supported by a fixed part.

[Effect]

(In the invention of :, the turret head is connected to the rotary drive electric motor by a universal joint, so the rotation of the drive electric machine is transmitted to the turret head. Since the support body is connected to the vertical drive electric motor by a link mechanism, the rotation of the vertical drive electric motor is converted into vertical motion and transmitted to the turret head.

〔Example〕

1 and 2 are views showing one embodiment of the present invention, with FIG. 1 being a side view and FIG. 2 being a longitudinal sectional view.

(4) ~181. Ql and α2 are the same as in the conventional device described above.

In the figure, the haze is an L-shaped platform (15) and a cylindrical body (151).
:+) A nine-turn drive electric motor (4) and a vertical drive electric motor are fixed to the base. 016.un is a support body which pivotally supports the shaft (7) of the turret head (5) via a bearing 18) and is supported so as to be movable in the vertical direction via a linear bearing circle; un is a universal joint that is connected to the shaft (7) and the rotation drive electric motor 14) and connected to each other by a shaft joint O, and the shaft (7) and the rotation and drive electric motor (4) are in the same position. This makes it possible to transmit rotation even if they are not arranged on a line. CXt+ is a table part (15 is pivotally supported and has a toothed bell) (via 12 is a vertical drive electric motor 0).
1, the driven disc, ri, is a rond whose one end is pivotally attached to the circumference of the disc Qυ, and (to) is formed in an L-shape, and its corner is pivoted to the body (15t) with a pin. One end of the lever is pivotally connected to the other end of the iron, and the other end is equipped with a roller (c) that comes into contact with the support Oe.

(to) is a tension spring stretched between the other end of the lever so and the support body un.

In the semiconductor holding head drive device configured as described above, when the two-turn vehicle commuting machine (4) rotates by a predetermined amount, the shaft (7) rotates via the universal joint 1191 l1i111121 and the universal joint δ. Shi turret head (5)
rotates.

On the other hand, when the vertical drive α motive Ql rotates clockwise in FIG. 1, the 9th disc Qυ also rotates in the same direction, and the Rondo moves to the left. The lever (C) rotates clockwise around the bin U4, and the roller (C) pushes the support uf3 upward. Now, the shafts of the upper part (4) of the support body αB are no longer arranged on the same straight line through the bearing aη, but the universal joints tl &
, fi9, the rotation of the rotary drive machine 14) is transmitted to the turret head (5) without any hindrance.

When the vertical drive electric motor u1 rotates counterclockwise.

Contrary to the above, the rod (23) moves to the right and the lever e23 rotates counterclockwise.Now, when the other end of the lever (to) descends, the support body uG is moved through the tension spring (to). The turret head 15+ also moves downward.

In this way, the 9-rotation driving electric motor 14) is fixed to the base housing, and only the part beyond the support body ue is moved vertically by a link mechanism consisting of a lever. Therefore, the vertical drive electric motor +IQ can be of small capacity.

〔Effect of the invention〕

As explained above, in this invention, a nine-rotation drive electric motor and a vertical drive motive are installed in a fixed part.

The turret head is pivotally supported by a support body, and the turret head is connected to the 9 rotations 1 drive motor with a universal joint, and the vertical drive motor and support body are connected by a link mechanism pivotally supported on a fixed part, so the vertical drive The capacity of the electric motor can be reduced, making the device lightweight and compact.

This has the effect of improving responsiveness.

[Brief explanation of the drawing]

FIG. 1 is a side view showing an embodiment of a drive device for a semiconductor holding head according to the present invention, FIG. 2 is a longitudinal sectional view of FIG. 1,
FIG. 3 is a longitudinal section showing a conventional drive device for a head for holding a semi-woven body. el't in the figure) t: Tortoise for rotational drive #lf*I 15+
is the turret head, (6) is the collet, 01) is the vertical drive electric motor, u9 is the fixed part (heath), U6+ is the support body, US, μm is the universal joint, and the link mechanism (lot)
, @ is a link mechanism (lever). Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (1)

[Claims] A turret head with a pellet-adsorbing collet attached to its outer periphery is rotated by a rotary drive motor and moved vertically by a vertical drive motor, in which the rotary drive and vertical drive motors are installed on a fixed part. A support body for pivotally supporting the turret head is provided, a universal joint is provided for connecting the rotary drive motor and the turret head and transmitting the rotation of the rotary drive motor to the turret head regardless of the positions of these shafts; 1. A drive device for a semiconductor holding head, comprising a link mechanism having a portion pivotally supported by the fixed portion, one end coupled to the vertical drive motor, and the other end coupled to the support body.