JPH06246562A - Xy induction actuator - Google Patents

Abstract

PURPOSE:To propose an XY induction actuator enabling the positioning of a workpiece or the like in an optional position on the plane without using a ball screw and a lead screw. CONSTITUTION:The hollow rotating member 74 of an XY induction actuator 71 is rotated around a rotation center axis 71a by a motor 76. A second annular rotating member 78 is rotatably supported on the eccentric outer peripheral surface of eccentric quantity e1 formed at the hollow. rotating member 74, and a motor 81 is fitted to the member 78. A third annular rotating member 85 is fitted, in the state of being decentered by e2, to the end of the second annular rotating member 78. When both motors 76, 81 are driven to rotate the hollow rotating member 74, the center or the third annular rotating member as fitted to the end of the hollow rotating member 74 can be positioned in an optional position within a range of radius (e1+e2) on the plane.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an XY induction actuator used for positioning a work or the like at a target position on a plane.

[0002]

2. Description of the Related Art An XY stage drive actuator is used to position a work or the like at a target position on a plane. This actuator transmits the rotation output of the motor to a stage supported movably in the X-axis and Y-axis directions via a power transmission mechanism such as a ball screw and a lead screw, thereby causing the stage to move in the X-axis and Y
The stage is moved in the axial direction by a predetermined distance to position the stage at a target position on the plane.

[0003]

SUMMARY OF THE INVENTION An object of the present invention is to propose an XY induction actuator constructed so that a workpiece or the like can be positioned at a target position on a plane without using a ball screw or a lead screw. Especially.

[0004]

In order to solve the above problems, the XY induction actuator of the present invention basically has a first rotating body and a center axis of rotation of the first rotating body as a center. And a third rotating body that is eccentrically attached to the second rotating body. The third rotating body is rotated by rotating the rotating body. It employs a configuration in which a work or the like supported by is positioned at a target position on a plane.

That is, the XY induction actuator according to the first invention of the present application is such that a first annular rotating member (first rotating body) rotatably supported and a center of rotation of the first annular rotating member. The circular inner peripheral surface of the first annular rotating member is rotatably supported about the axis and is supported by the circular inner peripheral surface of the first annular rotating member, and a circular inner peripheral surface centered on a position eccentric to the rotational center axis is formed inside A second annular rotating member, and a hollow rotating member (second rotating body) rotatably supported on the circular inner peripheral surface of the second annular rotating member,
A third annular rotating member (third rotating body) attached to the hollow rotating member in an eccentric state, and arranged outside the first annular rotating member to rotate the first annular rotating member. And a second rotating means for rotating the second annular rotating member, which is arranged outside the second annular rotating member.

Further, the XY induction actuator according to the second invention of the present application is such that the first annular support member disposed at a fixed position and the first rotation center with respect to the inner side of the first annular support member. A hollow rotating member (first rotating body) that is rotatably supported about an axis and has a hollow portion (second rotating body) centered on a position eccentric to the first rotation center axis is formed. Rotating body), first rotating means fixed to the outside of the first annular support member for rotating the hollow rotating member, and the hollow rotating member formed concentrically with the hollow portion. A circular outer peripheral surface, a second annular support member rotatably supported by the circular outer peripheral surface, and a second rotation for rotating the hollow rotary member, which is attached to the outside of the second annular support member. Means and said second in an eccentric state It is characterized by having an annular rotary member mounted on the annular support member (third rotating member).

[0007]

The second rotating body is eccentrically rotated about the central axis of rotation. Further, the third rotating body eccentrically rotates with respect to the second rotating body. Therefore, by rotating these rotating bodies to a predetermined angular position, the center of the third rotating body can be positioned at an arbitrary position within a predetermined radius on the plane.

[0008]

Embodiments of the present invention will be described below with reference to the drawings.

First Embodiment FIGS. 1, 2 and 3 show an XY induction actuator according to a first embodiment of the present invention. In the XY induction actuator 1 of this example, 2 is a first annular rotating member. A second annular rotary member 3 is arranged at a position adjacent to the first annular rotary member 2 in the axial direction. The second annular rotating member 3 includes a portion having an outer peripheral surface 3a having a large diameter and an outer peripheral surface 3 having a small diameter.
The outer peripheral surface 3a having a large diameter is rotatably supported by a bearing 5 on the inner peripheral surface of the annular base 4 mounted at a fixed position.
A portion of the outer peripheral surface 3b having a small diameter is inserted inside the first annular rotating member 2, and this portion rotatably supports the first annular rotating member 2 via the bearing 6. There is. These annular rotating members 2 and 3 rotate about the rotation center axis line 1a.

The circular inner peripheral surface 3c formed inside the second annular rotating member 3 is formed so that the center 3d is located at a position eccentric with respect to the rotation center axis 1a by a first eccentric amount e1. ing. A hollow rotating member 8 is rotatably supported on the eccentric circular inner peripheral surface 3a via a bearing 7. One end side of the hollow rotating member 8 is engaged with the annular end surface 3e of the second annular rotating member 3 via the retaining member 9, and the movement in the axial direction is restricted.

A third annular rotary member 11 is fixed to the other end surface of the hollow rotary member 8 by a bolt in a state of being eccentric by e2 with respect to the center 3d of the member. On the other hand, on the outer peripheral surface of the annular base 4, a support plate 12 is fixed so as to extend in the tangential direction of the base, and two motors 13 and 14 are installed adjacent to this on the support plate 12. These motors are arranged opposite to each other in parallel with the rotation center axis 1a. Therefore, one motor 1
The output shaft 13a of No. 3 projects to the side of the first annular rotating member 2, and a drive pulley 15 having a small diameter is fixed to this. A large diameter driven pulley 16 is fixed to the outer periphery of the end of the first annular rotating member 2 so as to face the drive pulley 15. A belt 17 is stretched between these pulleys.

Similarly, the output shaft 14a of the other motor 14
Protrudes toward the second annular rotating member 3, and a small-diameter drive pulley 18 is also fixed thereto. A large diameter driven pulley 19 is fixed to the outer periphery of the end portion of the second annular rotating member 3 so as to face the drive pulley 18. A belt 21 is stretched between these pulleys.

In the XY induction actuator 1 of this structure, when the motor 13 is driven, its rotational force is transmitted to the first annular rotary member 2 side via the belt and pulley transmission mechanism, and the first annular rotary member 2 is rotated. The member 2 rotates around the central axis 1a. Further, when the motor 14 is driven, the second annular rotating member 3 is moved by the decelerating rotational force to the central axis line 1.
Rotate around a. The circular inner peripheral surface 3c formed inside the second annular rotating member 3 is e with respect to the central axis 1a.
Only one is eccentric. Therefore, this circular inner peripheral surface 3c
The hollow rotation member 8 supported by the eccentric rotation rotates about the rotation center axis line 1a with an eccentric amount e1. A third annular rotating member 11 is eccentrically attached to the end of the eccentrically rotating hollow rotating member 8. Therefore, this third
The annular rotating member 11 of eccentrically rotates with respect to the hollow rotating member 8 by an eccentric amount e2.

Next, FIG. 4 shows an example of a posture control mechanism of a hollow shaft using the XY induction actuator 1 having the above structure. In this figure, the XY induction actuators 31 and 41 arranged on both sides have the same structure as the XY induction actuator 1 described above. Therefore, in the following description, the parts corresponding to the parts shown in FIGS.

As shown in the figure, in both of the XY induction actuators 31 and 41, the annular base 4 is fixed to the mounts 51 and 52 by bolts, respectively. Here, on the inner peripheral surface of the third annular rotating member 11 in the one XY induction actuator 31, via the self-aligning bearing 32,
One end of the hollow shaft 53 to be controlled is rotatably and angularly supported. The hollow shaft 53 extends through the hollow rotary member 8 of the other XY induction actuator 41. And the other end of the hollow shaft is the self-aligning ball bearing 4
2 is supported by the inner peripheral surface of the third annular rotating member 11 of the XY induction actuator 41 so as to be rotatable and angularly movable.

On the other hand, these actuators 31, 41
An actuator 61 having another structure is arranged at a position between the two. This actuator 61 has an annular base 62.
And a hollow rotating member 63 rotatably supported on the inner peripheral surface, and the annular base 62 is supported by a mount 64. A large-diameter driven pulley 65 is fixed to the outer periphery of the hollow rotating member 63, and the pulley 65 has an output shaft 67a of a motor 67 fixedly arranged via a belt 66.
It is connected to a small-diameter drive pulley 68 that is fixed to the. The hollow shaft 53 to be controlled is arranged so as to penetrate the hollow rotary member 63.

In the attitude control mechanism thus constructed, the hollow shaft 5 is driven by driving the motors of the actuators 31, 41 and 61, for example, as shown in FIG.
The posture of 3 can be changed.

Second Embodiment FIGS. 6, 7 and 8 show a second embodiment of the present invention. In the XY induction actuator 71 of this example, 72
Is an annular base arranged in a fixed position. A hollow rotating member 74 is rotatably supported on the inner peripheral surface of the annular base 72 via a bearing 73. The hollow rotating member 74 is adapted to rotate around the rotation center axis indicated by the line segment 71a. However, this hollow rotating member 7
The hollow portion 74a formed inside 4 is centered on a position eccentric to the central rotation axis 71a by the first eccentric amount e1.

A mounting plate 75 is mounted on the outer peripheral surface of the annular base 72 so as to extend in the tangential direction thereof, and a motor 76 is mounted on the mounting plate 75 in parallel with the rotation center axis 71a. A small-diameter drive pulley 77 is fixed to the output shaft 76a of the motor 76, and a large-diameter driven pulley 78 is fixed to the outer circumference of the hollow rotating member 74 facing the pulley 77. A belt 79 is stretched between these pulleys. When the motor 76 is driven, the hollow rotating member 74 rotates about the rotation center axis line 71a.

Here, the hollow rotating member 74 is formed with a circular outer peripheral surface 74b concentric with the hollow portion 74a. That is, the center of the circular outer peripheral surface 74b is eccentric by e1 with respect to the rotation center axis 71a. A second annular rotating member 78 is rotatably supported on the circular outer peripheral surface 74b via a bearing 77. This second
A mounting plate 79 is mounted on the outer peripheral surface of the annular member 78 so as to extend in the tangential direction thereof, and a motor 81 is mounted thereon so as to be parallel to the rotation center axis 71a.

A small-diameter drive pulley 82 is fixed to the output shaft 81a of the motor 81, and a large-diameter driven pulley 83 is fixed to a circular outer peripheral surface 74b facing the pulley 82. A belt 84 is stretched over.

On the other hand, a third annular rotating member 85 is fixed to the end surface of the second annular rotating member 78. The third annular rotating member 85 is mounted in a state centered on a position eccentric to the center of the hollow portion 74a by an eccentric amount e2.

In the XY induction actuator 71 of the present embodiment thus constructed, when the motor 76 is driven, the hollow rotating member 74 rotates about the rotation center axis 71a.
At this time, the other motor 81 is connected to the hollow rotating member 74 via the belt and the pulley transmission mechanism (82, 83, 84). Therefore, the motor 81 rotates integrally with the hollow rotary member 74 together with the second annular rotary member 78 rotatably supported on the eccentric outer peripheral surface 74b of the hollow rotary member 74. That is, these rotate eccentrically with the eccentric amount e1 about the rotation center axis 71a. Therefore, the third annular rotating member 85 attached to the tip of the annular rotating member 78 also eccentrically rotates.

When the motor 81 is driven, the motor and the second annular rotary member 7 supporting the motor 81 are supported.
8 eccentrically rotates around the rotation center axis 71a with an eccentric amount e1. Therefore, the third annular rotating member 85 attached to this tip also eccentrically rotates.

As described above, by driving the motors 76 and 81, the third annular rotating member 85 can be rotated to the predetermined rotation angle position with the eccentricity e2 about the rotation center axis 71a. That is, the center of the third annular rotating member 85 can be positioned at any position within the range of the radius (e1 + e2) about the rotation center axis 71a.

In each of the above embodiments, the rotational force of the motor is transmitted to the rotating member side via the transmission mechanism including the belt and the pulley. Instead of this, it is of course possible to transmit the rotational force using a transmission mechanism including a gear train.

[0027]

As described above, in the XY induction actuator of the present invention, the first rotating body, the second rotating body that eccentrically rotates with respect to the first rotating body, and the eccentric state of the second rotating body. And a third rotating body attached by, and by rotating these rotating bodies, the center of the third rotating body is positioned at an arbitrary position within a predetermined radius on a plane. There is. Therefore, the work or the like can be positioned on the plane without using the ball screw or the lead screw.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of an XY induction actuator according to a first embodiment of the present invention.

FIG. 2 is a side view seen from the arrow II-II side in FIG.

FIG. 3 is a side view seen from the side of arrow III-III in FIG.

4 is a configuration diagram showing an example of a posture control mechanism using the actuator of FIG.

5 is a configuration diagram showing the operation of the mechanism of FIG.

FIG. 6 is a vertical sectional view of an XY induction actuator according to a second embodiment of the present invention.

FIG. 7 is a side view seen from the arrow VII-VII side in FIG.

FIG. 8 is a side view seen from the arrow VIII-VIII side in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... XY induction actuator 2 ... 1st annular rotating member 3 ... 2nd annular rotating member 8 ... Hollow rotating member 11 ... 3rd annular rotating member 13, 14 ... Motor 71 ... XY induction actuator 74 ... Hollow rotating member 76 ... Motor 78 ... Second annular rotating member 81 ... Motor 85 ... Third annular rotating member

Claims (2)

[Claims] 1. A first annular rotating member rotatably supported, and a circular inner circumference of the first annular rotating member in a state of being rotatable about a rotation center axis line of the first annular rotating member. A second annular rotating member, which is supported by a surface and has a circular inner peripheral surface centered on a position eccentric with respect to the rotation center axis line, and a circular shape of the second annular rotating member. A hollow rotary member rotatably supported with respect to the inner peripheral surface, a third annular rotary member attached to the hollow rotary member in an eccentric state, and arranged outside the first annular rotary member, First rotating means for rotating the first annular rotating member, and second rotating means arranged outside the second annular rotating member for rotating the second annular rotating member. XY characterized by having
Induction actuator. 2. A first annular support member arranged at a fixed position, and a first annular support member with respect to an inner side of the first annular support member.
A hollow rotation member that is rotatably supported about the rotation center axis line of, and that has a hollow portion formed around a position eccentric to the first rotation center axis line,
A first rotating means fixed to the outside of the first annular supporting member for rotating the hollow rotating member; and a circular outer peripheral surface formed concentrically with the hollow portion in the hollow rotating member, A second annular support member rotatably supported by the circular outer peripheral surface, a second rotating means attached to the outside of the second annular support member for rotating the hollow rotating member, and an eccentric state. And an annular rotating member attached to the second annular supporting member.