JPS6390840U - - Google Patents

Info

Publication number
JPS6390840U
JPS6390840U JP18635386U JP18635386U JPS6390840U JP S6390840 U JPS6390840 U JP S6390840U JP 18635386 U JP18635386 U JP 18635386U JP 18635386 U JP18635386 U JP 18635386U JP S6390840 U JPS6390840 U JP S6390840U
Authority
JP
Japan
Prior art keywords
rotating shaft
box
drive mechanism
holding jig
electric motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18635386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18635386U priority Critical patent/JPS6390840U/ja
Publication of JPS6390840U publication Critical patent/JPS6390840U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Drying Of Semiconductors (AREA)
JP18635386U 1986-12-02 1986-12-02 Pending JPS6390840U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18635386U JPS6390840U (enrdf_load_stackoverflow) 1986-12-02 1986-12-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18635386U JPS6390840U (enrdf_load_stackoverflow) 1986-12-02 1986-12-02

Publications (1)

Publication Number Publication Date
JPS6390840U true JPS6390840U (enrdf_load_stackoverflow) 1988-06-13

Family

ID=31135832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18635386U Pending JPS6390840U (enrdf_load_stackoverflow) 1986-12-02 1986-12-02

Country Status (1)

Country Link
JP (1) JPS6390840U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021106197A (ja) * 2019-12-26 2021-07-26 東京エレクトロン株式会社 基板処理装置及び基板処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021106197A (ja) * 2019-12-26 2021-07-26 東京エレクトロン株式会社 基板処理装置及び基板処理方法

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