JPS6390842U - - Google Patents

Info

Publication number
JPS6390842U
JPS6390842U JP18635586U JP18635586U JPS6390842U JP S6390842 U JPS6390842 U JP S6390842U JP 18635586 U JP18635586 U JP 18635586U JP 18635586 U JP18635586 U JP 18635586U JP S6390842 U JPS6390842 U JP S6390842U
Authority
JP
Japan
Prior art keywords
rotating shaft
box
semiconductor wafer
electrostatic electrode
holding jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18635586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18635586U priority Critical patent/JPS6390842U/ja
Publication of JPS6390842U publication Critical patent/JPS6390842U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP18635586U 1986-12-02 1986-12-02 Pending JPS6390842U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18635586U JPS6390842U (enrdf_load_stackoverflow) 1986-12-02 1986-12-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18635586U JPS6390842U (enrdf_load_stackoverflow) 1986-12-02 1986-12-02

Publications (1)

Publication Number Publication Date
JPS6390842U true JPS6390842U (enrdf_load_stackoverflow) 1988-06-13

Family

ID=31135836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18635586U Pending JPS6390842U (enrdf_load_stackoverflow) 1986-12-02 1986-12-02

Country Status (1)

Country Link
JP (1) JPS6390842U (enrdf_load_stackoverflow)

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