JPH03106728U - - Google Patents

Info

Publication number
JPH03106728U
JPH03106728U JP1558490U JP1558490U JPH03106728U JP H03106728 U JPH03106728 U JP H03106728U JP 1558490 U JP1558490 U JP 1558490U JP 1558490 U JP1558490 U JP 1558490U JP H03106728 U JPH03106728 U JP H03106728U
Authority
JP
Japan
Prior art keywords
support
wiring
hole
rotary stage
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1558490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1558490U priority Critical patent/JPH03106728U/ja
Publication of JPH03106728U publication Critical patent/JPH03106728U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1558490U 1990-02-21 1990-02-21 Pending JPH03106728U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1558490U JPH03106728U (enrdf_load_stackoverflow) 1990-02-21 1990-02-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1558490U JPH03106728U (enrdf_load_stackoverflow) 1990-02-21 1990-02-21

Publications (1)

Publication Number Publication Date
JPH03106728U true JPH03106728U (enrdf_load_stackoverflow) 1991-11-05

Family

ID=31518883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1558490U Pending JPH03106728U (enrdf_load_stackoverflow) 1990-02-21 1990-02-21

Country Status (1)

Country Link
JP (1) JPH03106728U (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61214520A (ja) * 1985-03-20 1986-09-24 Hitachi Ltd 塗布装置
JPS6226817A (ja) * 1985-07-29 1987-02-04 Canon Inc スピンナ−装置
JPS6253773A (ja) * 1985-08-30 1987-03-09 Nec Corp 有機膜塗布装置
JPS63250820A (ja) * 1987-04-08 1988-10-18 Mitsubishi Electric Corp 塗布装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61214520A (ja) * 1985-03-20 1986-09-24 Hitachi Ltd 塗布装置
JPS6226817A (ja) * 1985-07-29 1987-02-04 Canon Inc スピンナ−装置
JPS6253773A (ja) * 1985-08-30 1987-03-09 Nec Corp 有機膜塗布装置
JPS63250820A (ja) * 1987-04-08 1988-10-18 Mitsubishi Electric Corp 塗布装置

Similar Documents

Publication Publication Date Title
JPH03106728U (enrdf_load_stackoverflow)
JPS6172063U (enrdf_load_stackoverflow)
JPS6411423U (enrdf_load_stackoverflow)
JPS63169253U (enrdf_load_stackoverflow)
JPH0363724U (enrdf_load_stackoverflow)
JPH01109026U (enrdf_load_stackoverflow)
JPH0263087U (enrdf_load_stackoverflow)
JPS62168900U (enrdf_load_stackoverflow)
JPS62175892U (enrdf_load_stackoverflow)
JPH0294456U (enrdf_load_stackoverflow)
JPH0317199U (enrdf_load_stackoverflow)
JPH0345498U (enrdf_load_stackoverflow)
JPS63117271U (enrdf_load_stackoverflow)
JPH0164016U (enrdf_load_stackoverflow)
JPH036090U (enrdf_load_stackoverflow)
JPH03123998U (enrdf_load_stackoverflow)
JPS6220659U (enrdf_load_stackoverflow)
JPH0392983U (enrdf_load_stackoverflow)
JPH0250091U (enrdf_load_stackoverflow)
JPS6330463U (enrdf_load_stackoverflow)
JPS63136287U (enrdf_load_stackoverflow)
JPS6163229U (enrdf_load_stackoverflow)
JPS6298462U (enrdf_load_stackoverflow)
JPH0246090U (enrdf_load_stackoverflow)
JPS62192596U (enrdf_load_stackoverflow)