JPS6390435U - - Google Patents

Info

Publication number
JPS6390435U
JPS6390435U JP18296386U JP18296386U JPS6390435U JP S6390435 U JPS6390435 U JP S6390435U JP 18296386 U JP18296386 U JP 18296386U JP 18296386 U JP18296386 U JP 18296386U JP S6390435 U JPS6390435 U JP S6390435U
Authority
JP
Japan
Prior art keywords
ring
sealing
vacuum device
ratio
sectional area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18296386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18296386U priority Critical patent/JPS6390435U/ja
Publication of JPS6390435U publication Critical patent/JPS6390435U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gasket Seals (AREA)
JP18296386U 1986-11-28 1986-11-28 Pending JPS6390435U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18296386U JPS6390435U (zh) 1986-11-28 1986-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18296386U JPS6390435U (zh) 1986-11-28 1986-11-28

Publications (1)

Publication Number Publication Date
JPS6390435U true JPS6390435U (zh) 1988-06-11

Family

ID=31129254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18296386U Pending JPS6390435U (zh) 1986-11-28 1986-11-28

Country Status (1)

Country Link
JP (1) JPS6390435U (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0398363U (zh) * 1990-01-29 1991-10-11
JP2006019101A (ja) * 2004-06-30 2006-01-19 Canon Inc 真空機器の製造装置及び製造方法、真空機器、荷電粒子線露光装置、デバイス製造方法
JP2009176822A (ja) * 2008-01-22 2009-08-06 Tokyo Electron Ltd シール機構、シール溝、シール部材及び基板処理装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0398363U (zh) * 1990-01-29 1991-10-11
JP2006019101A (ja) * 2004-06-30 2006-01-19 Canon Inc 真空機器の製造装置及び製造方法、真空機器、荷電粒子線露光装置、デバイス製造方法
JP4559137B2 (ja) * 2004-06-30 2010-10-06 キヤノン株式会社 真空機器の製造装置及び製造方法
JP2009176822A (ja) * 2008-01-22 2009-08-06 Tokyo Electron Ltd シール機構、シール溝、シール部材及び基板処理装置

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