JPS63160471U - - Google Patents

Info

Publication number
JPS63160471U
JPS63160471U JP5206987U JP5206987U JPS63160471U JP S63160471 U JPS63160471 U JP S63160471U JP 5206987 U JP5206987 U JP 5206987U JP 5206987 U JP5206987 U JP 5206987U JP S63160471 U JPS63160471 U JP S63160471U
Authority
JP
Japan
Prior art keywords
groove
ring
entrance
rectangular cross
fitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5206987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5206987U priority Critical patent/JPS63160471U/ja
Publication of JPS63160471U publication Critical patent/JPS63160471U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gasket Seals (AREA)
JP5206987U 1987-04-08 1987-04-08 Pending JPS63160471U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5206987U JPS63160471U (zh) 1987-04-08 1987-04-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5206987U JPS63160471U (zh) 1987-04-08 1987-04-08

Publications (1)

Publication Number Publication Date
JPS63160471U true JPS63160471U (zh) 1988-10-20

Family

ID=30876908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5206987U Pending JPS63160471U (zh) 1987-04-08 1987-04-08

Country Status (1)

Country Link
JP (1) JPS63160471U (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005140240A (ja) * 2003-11-06 2005-06-02 Max Co Ltd カプラにおけるシール機構
JP2019533909A (ja) * 2016-11-10 2019-11-21 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated 電子デバイス製造用のロードポートの機器、システム、及び方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005140240A (ja) * 2003-11-06 2005-06-02 Max Co Ltd カプラにおけるシール機構
JP2019533909A (ja) * 2016-11-10 2019-11-21 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated 電子デバイス製造用のロードポートの機器、システム、及び方法
TWI743246B (zh) * 2016-11-10 2021-10-21 美商應用材料股份有限公司 製造電子裝置的裝載端口設備、系統及方法

Similar Documents

Publication Publication Date Title
JPS63160471U (zh)
JPH038742U (zh)
JPS6390435U (zh)
JPS6386435U (zh)
JPH0171269U (zh)
JPS6195449U (zh)
JPS6261479U (zh)
JPH01119509U (zh)
JPH0239015U (zh)
JPH0171277U (zh)
JPS61177219U (zh)
JPS63145057U (zh)
JPH0329638U (zh)
JPH0359811U (zh)
JPS6155815U (zh)
JPH01115068U (zh)
JPH0387269U (zh)
JPH0183844U (zh)
JPH0162678U (zh)
JPS6384246U (zh)
JPS63101563U (zh)
JPS6195450U (zh)
JPH0229961U (zh)
JPS61101008U (zh)
JPH02134357U (zh)