JPS6389247U - - Google Patents
Info
- Publication number
- JPS6389247U JPS6389247U JP18386886U JP18386886U JPS6389247U JP S6389247 U JPS6389247 U JP S6389247U JP 18386886 U JP18386886 U JP 18386886U JP 18386886 U JP18386886 U JP 18386886U JP S6389247 U JPS6389247 U JP S6389247U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- manufacturing jig
- connecting member
- side plates
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18386886U JPS6389247U (enExample) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18386886U JPS6389247U (enExample) | 1986-11-28 | 1986-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6389247U true JPS6389247U (enExample) | 1988-06-10 |
Family
ID=31130998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18386886U Pending JPS6389247U (enExample) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6389247U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58215052A (ja) * | 1982-06-08 | 1983-12-14 | Nec Corp | ウエハ−収納治具 |
-
1986
- 1986-11-28 JP JP18386886U patent/JPS6389247U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58215052A (ja) * | 1982-06-08 | 1983-12-14 | Nec Corp | ウエハ−収納治具 |