JPS63110042U - - Google Patents
Info
- Publication number
- JPS63110042U JPS63110042U JP1987001545U JP154587U JPS63110042U JP S63110042 U JPS63110042 U JP S63110042U JP 1987001545 U JP1987001545 U JP 1987001545U JP 154587 U JP154587 U JP 154587U JP S63110042 U JPS63110042 U JP S63110042U
- Authority
- JP
- Japan
- Prior art keywords
- angled surface
- carrier
- holding
- semiconductor
- suction hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987001545U JPS63110042U (enExample) | 1987-01-08 | 1987-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987001545U JPS63110042U (enExample) | 1987-01-08 | 1987-01-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110042U true JPS63110042U (enExample) | 1988-07-15 |
Family
ID=30779552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987001545U Pending JPS63110042U (enExample) | 1987-01-08 | 1987-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110042U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003077988A (ja) * | 2001-09-06 | 2003-03-14 | Nitto Denko Corp | 半導体ウエハのマウント方法およびこれに用いるカセット |
-
1987
- 1987-01-08 JP JP1987001545U patent/JPS63110042U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003077988A (ja) * | 2001-09-06 | 2003-03-14 | Nitto Denko Corp | 半導体ウエハのマウント方法およびこれに用いるカセット |