JPS6389237U - - Google Patents

Info

Publication number
JPS6389237U
JPS6389237U JP18353486U JP18353486U JPS6389237U JP S6389237 U JPS6389237 U JP S6389237U JP 18353486 U JP18353486 U JP 18353486U JP 18353486 U JP18353486 U JP 18353486U JP S6389237 U JPS6389237 U JP S6389237U
Authority
JP
Japan
Prior art keywords
holder
vacuum valve
vacuum
bellows
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18353486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18353486U priority Critical patent/JPS6389237U/ja
Publication of JPS6389237U publication Critical patent/JPS6389237U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP18353486U 1986-11-28 1986-11-28 Pending JPS6389237U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18353486U JPS6389237U (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18353486U JPS6389237U (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Publications (1)

Publication Number Publication Date
JPS6389237U true JPS6389237U (enrdf_load_stackoverflow) 1988-06-10

Family

ID=31130361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18353486U Pending JPS6389237U (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Country Status (1)

Country Link
JP (1) JPS6389237U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS56145642A (en) Reciprocal mechanism for intra-vacuum chamber body of revolution
JPS6389237U (enrdf_load_stackoverflow)
JPH0737794A (ja) 真空内駆動装置
CN112582250B (zh) 一种基质辅助激光解吸离子源装置
JPS63127125U (enrdf_load_stackoverflow)
JPS5821636Y2 (ja) 物体支持装置
JPS63134678A (ja) エツチング装置
JPS62157968U (enrdf_load_stackoverflow)
JPS61176258U (enrdf_load_stackoverflow)
JPH0246157Y2 (enrdf_load_stackoverflow)
JPH0176033U (enrdf_load_stackoverflow)
JPS62114438U (enrdf_load_stackoverflow)
JPH0380958U (enrdf_load_stackoverflow)
JPS6215566U (enrdf_load_stackoverflow)
JPS61123656U (enrdf_load_stackoverflow)
JPS6221065U (enrdf_load_stackoverflow)
JPS63123668U (enrdf_load_stackoverflow)
JPS62197062U (enrdf_load_stackoverflow)
JPH0425230U (enrdf_load_stackoverflow)
JPS6237082U (enrdf_load_stackoverflow)
JPS61167934U (enrdf_load_stackoverflow)
JPS6267242U (enrdf_load_stackoverflow)
JPS6280324U (enrdf_load_stackoverflow)
JPH02120831U (enrdf_load_stackoverflow)
JPS6263929U (enrdf_load_stackoverflow)