JPS6388743A - 表面解析装置 - Google Patents

表面解析装置

Info

Publication number
JPS6388743A
JPS6388743A JP61235397A JP23539786A JPS6388743A JP S6388743 A JPS6388743 A JP S6388743A JP 61235397 A JP61235397 A JP 61235397A JP 23539786 A JP23539786 A JP 23539786A JP S6388743 A JPS6388743 A JP S6388743A
Authority
JP
Japan
Prior art keywords
sample
acceleration
potential
ion beam
deflection magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61235397A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0520856B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Masashi Konishi
正志 小西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP61235397A priority Critical patent/JPS6388743A/ja
Priority to US07/070,252 priority patent/US4829179A/en
Priority to EP87110018A priority patent/EP0253336B1/en
Priority to DE8787110018T priority patent/DE3781963T2/de
Publication of JPS6388743A publication Critical patent/JPS6388743A/ja
Publication of JPH0520856B2 publication Critical patent/JPH0520856B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP61235397A 1986-07-12 1986-10-01 表面解析装置 Granted JPS6388743A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP61235397A JPS6388743A (ja) 1986-10-01 1986-10-01 表面解析装置
US07/070,252 US4829179A (en) 1986-07-12 1987-07-06 Surface analyzer
EP87110018A EP0253336B1 (en) 1986-07-12 1987-07-10 Surface analyzer
DE8787110018T DE3781963T2 (de) 1986-07-12 1987-07-10 Oberflaechenanalysegeraet.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61235397A JPS6388743A (ja) 1986-10-01 1986-10-01 表面解析装置

Publications (2)

Publication Number Publication Date
JPS6388743A true JPS6388743A (ja) 1988-04-19
JPH0520856B2 JPH0520856B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-22

Family

ID=16985483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61235397A Granted JPS6388743A (ja) 1986-07-12 1986-10-01 表面解析装置

Country Status (1)

Country Link
JP (1) JPS6388743A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0520856B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-22

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