JPS6388730U - - Google Patents
Info
- Publication number
- JPS6388730U JPS6388730U JP18397286U JP18397286U JPS6388730U JP S6388730 U JPS6388730 U JP S6388730U JP 18397286 U JP18397286 U JP 18397286U JP 18397286 U JP18397286 U JP 18397286U JP S6388730 U JPS6388730 U JP S6388730U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- air
- detection
- substrate
- detection signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986183972U JPH0542355Y2 (fr) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986183972U JPH0542355Y2 (fr) | 1986-11-28 | 1986-11-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6388730U true JPS6388730U (fr) | 1988-06-09 |
| JPH0542355Y2 JPH0542355Y2 (fr) | 1993-10-26 |
Family
ID=31131203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986183972U Expired - Lifetime JPH0542355Y2 (fr) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542355Y2 (fr) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5311863A (en) * | 1976-07-19 | 1978-02-02 | Centro Maskin Goteborg Ab | Gas cutting method and device |
| JPS5322385A (en) * | 1976-08-13 | 1978-03-01 | Hitachi Ltd | Diffusion type semiconductor pr essure receiving element |
| JPS53151574U (fr) * | 1977-05-06 | 1978-11-29 | ||
| JPS5931404A (ja) * | 1982-08-16 | 1984-02-20 | Hitachi Ltd | 圧力センサ回路 |
-
1986
- 1986-11-28 JP JP1986183972U patent/JPH0542355Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5311863A (en) * | 1976-07-19 | 1978-02-02 | Centro Maskin Goteborg Ab | Gas cutting method and device |
| JPS5322385A (en) * | 1976-08-13 | 1978-03-01 | Hitachi Ltd | Diffusion type semiconductor pr essure receiving element |
| JPS53151574U (fr) * | 1977-05-06 | 1978-11-29 | ||
| JPS5931404A (ja) * | 1982-08-16 | 1984-02-20 | Hitachi Ltd | 圧力センサ回路 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542355Y2 (fr) | 1993-10-26 |