JPS6388730U - - Google Patents
Info
- Publication number
- JPS6388730U JPS6388730U JP18397286U JP18397286U JPS6388730U JP S6388730 U JPS6388730 U JP S6388730U JP 18397286 U JP18397286 U JP 18397286U JP 18397286 U JP18397286 U JP 18397286U JP S6388730 U JPS6388730 U JP S6388730U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- air
- detection
- substrate
- detection signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図乃至第４図は本考案の第１の実施例を示
すもので、第１図は検出基板の上面図、第２図は
全体の縦断面図、第３図は要部の拡大縦断面図、
第４図は電気的構成図、第５図及び第６図は本考
案の第２の実施例を示すもので、第５図は検出基
板の上面図、第６図は電気的構成図である。
図面中、１はダイヤフラム基板、２はダイヤフ
ラム部、５は検出基板、６，７，１９及び２３は
固定電極、１２は圧力スイツチ、１３はセンサ、
１６は演算器、２２は第１の圧力スイツチ、２６
は第２の圧力スイツチ、２７は演算器である。
Figures 1 to 4 show a first embodiment of the present invention, in which Figure 1 is a top view of the detection board, Figure 2 is a vertical cross-sectional view of the entire body, and Figure 3 is an enlarged vertical cross-section of the main parts. side view,
Figure 4 is an electrical configuration diagram, Figures 5 and 6 show a second embodiment of the present invention, Figure 5 is a top view of the detection board, and Figure 6 is an electrical configuration diagram. . In the drawing, 1 is a diaphragm board, 2 is a diaphragm part, 5 is a detection board, 6, 7, 19 and 23 are fixed electrodes, 12 is a pressure switch, 13 is a sensor,
16 is a computing unit, 22 is a first pressure switch, 26
2 is a second pressure switch, and 27 is a computing unit.
Claims (1)
て変位するダイヤフラム部を有するダイヤフラム
基板と、このダイヤフラム基板に対向して設けら
れた検出基板と、この検出基板に設けられ前記ダ
イヤフラム部の変位が所定量になると圧力検知信
号を発生する圧力スイツチと、前記検出基板に設
けられ前記ダイヤフラム部に印加される圧力空気
の温度を検出して温度検出信号を出力するセンサ
と、前記検出基板に設けられ前記圧力検知信号と
前記温度検出信号とを演算して演算結果を出力す
る演算器とを具備してなる空気圧検出ユニツト。 A diaphragm substrate having a diaphragm portion that is displaced according to the pressure of the air when pressurized air is applied, a detection substrate provided opposite to the diaphragm substrate, and a detection substrate provided on the detection substrate that displaces the diaphragm portion according to the pressure of the air. a pressure switch that generates a pressure detection signal when a predetermined amount is reached; a sensor provided on the detection board that detects the temperature of the pressure air applied to the diaphragm portion and outputs a temperature detection signal; An air pressure detection unit comprising an arithmetic unit that calculates the pressure detection signal and the temperature detection signal and outputs a calculation result.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986183972U JPH0542355Y2 (en) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986183972U JPH0542355Y2 (en) | 1986-11-28 | 1986-11-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6388730U true JPS6388730U (en) | 1988-06-09 |
| JPH0542355Y2 JPH0542355Y2 (en) | 1993-10-26 |
Family
ID=31131203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986183972U Expired - Lifetime JPH0542355Y2 (en) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542355Y2 (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5311863A (en) * | 1976-07-19 | 1978-02-02 | Centro Maskin Goteborg Ab | Gas cutting method and device |
| JPS5322385A (en) * | 1976-08-13 | 1978-03-01 | Hitachi Ltd | Diffusion type semiconductor pr essure receiving element |
| JPS53151574U (en) * | 1977-05-06 | 1978-11-29 | ||
| JPS5931404A (en) * | 1982-08-16 | 1984-02-20 | Hitachi Ltd | Pressure sensor circuit |
-
1986
- 1986-11-28 JP JP1986183972U patent/JPH0542355Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5311863A (en) * | 1976-07-19 | 1978-02-02 | Centro Maskin Goteborg Ab | Gas cutting method and device |
| JPS5322385A (en) * | 1976-08-13 | 1978-03-01 | Hitachi Ltd | Diffusion type semiconductor pr essure receiving element |
| JPS53151574U (en) * | 1977-05-06 | 1978-11-29 | ||
| JPS5931404A (en) * | 1982-08-16 | 1984-02-20 | Hitachi Ltd | Pressure sensor circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542355Y2 (en) | 1993-10-26 |