JPS6388433A - Method and apparatus for detecting foreign matter - Google Patents

Method and apparatus for detecting foreign matter

Info

Publication number
JPS6388433A
JPS6388433A JP23373986A JP23373986A JPS6388433A JP S6388433 A JPS6388433 A JP S6388433A JP 23373986 A JP23373986 A JP 23373986A JP 23373986 A JP23373986 A JP 23373986A JP S6388433 A JPS6388433 A JP S6388433A
Authority
JP
Japan
Prior art keywords
container
rotation
light
foreign matter
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23373986A
Other languages
Japanese (ja)
Inventor
Fumitaka Hayata
早田 文隆
Hideo Koide
英夫 小出
Toshio Yamadera
山寺 利夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Plant Technologies Ltd
Original Assignee
Hitachi Plant Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Plant Technologies Ltd filed Critical Hitachi Plant Technologies Ltd
Priority to JP23373986A priority Critical patent/JPS6388433A/en
Publication of JPS6388433A publication Critical patent/JPS6388433A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To enable the detecting of foreign matters in a solution accurately free from viscosity thereof, by detecting and comparing the position of bright spots of reflected lights from a foreign matter in the solution exposed to an irradiation light before and after the start of the rotation of a container. CONSTITUTION:A container 10 is irradiated with an irradiation light 13 of a light source 12 and reception data of reflected lights 15, 17 and 19 from a foreign matter 14 and the like as received with a camera tube 20 is taken into a comparator 22 separately as data signal 26 before the start of the rotation of the container 10 and after the stop of the rotation. Then, the data signals 26 are converted with the device 22 into binary-coded video signals from video signals and computed with a built-in comparison mechanism with the signal 26 before the start of the rotation as control. On the other hand, the marks of bright spots of reflected lights due to a surface flaw 16 and a foul 18 of the container 10 will not be projected on a CRT because the quantity of light of bright spots as negative value before the start of the rotation of the container 10 is cancelled by the quantity of light of bright spots as positive value after the stop of the rotation. This enables detection of bright spot marks 14A and 14B alone of the reflected light due to the foreign matter 14 thereby ensuring accurate detection of the foreign matter 14 being destinguished from the surface flaw 16 and foul 18.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は異物検出方法並びにその装置に係り、特に透明
容器内の溶液中に浮遊する異物を検出する異物検出方法
並びにその装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a method and device for detecting foreign matter, and more particularly to a method and device for detecting foreign matter floating in a solution in a transparent container.

〔発明の背景〕[Background of the invention]

薬品アンプル又は、ビン内の異物の検査は、製品欠陥に
つながるビン内部の異物と、製品欠陥とは無関係な、ビ
ン表面の傷、あるいは汚れ等との区別が自動認識困難な
ため、目視検査に依っている。しかし、この方法は検査
のスルーフットが遅れ大量生産されるアンプルに適用で
きない。又、デジタル画像処理による方法では、アンプ
ル内の異物サイズは数十μm以下と細かく、アンプルビ
ンの表面の傷、あるいは汚れと略同サイズであるため、
識別が困難である。従って、通常の画像処理方法は異物
の検出に適用できない。
Inspection of foreign objects in chemical ampoules or bottles requires visual inspection because it is difficult to automatically distinguish between foreign objects inside the bottle that could lead to product defects and scratches or stains on the bottle surface that are unrelated to product defects. It depends. However, this method cannot be applied to mass-produced ampoules due to the slow inspection throughput. In addition, with the method using digital image processing, the size of foreign matter inside the ampoule is as small as several tens of micrometers or less, which is approximately the same size as a scratch or stain on the surface of the ampoule bottle.
Difficult to identify. Therefore, normal image processing methods cannot be applied to foreign object detection.

又、一方、最近では、アンプルを高速回転させた後、ブ
レーキをかけて急停止させて、内溶液と共に異物を浮遊
回転させ、アンプル側面より透過光を照射することによ
り、異物が、透過光を遮るために生じる影像の変化(光
量の変化)を検知し、良、不良の選別をする装置が開発
されている。
On the other hand, recently, after rotating the ampoule at high speed, the brakes are applied to stop the ampoule suddenly and the foreign matter is suspended and rotated together with the internal solution, and the transmitted light is irradiated from the side of the ampoule. A device has been developed that detects changes in the image (changes in the amount of light) caused by occlusion and distinguishes between good and bad images.

第3図は従来のアンプルの高速回転による異物検出方法
並びにその装置の説明図である。第3図に示すように検
査対象であるアンプル70は光源72からの照射光74
が投光レンズ76を介して照射される。照射光74はア
ンプル70内の溶液中を透光した後、結像レンズ78を
通って受光器80に達する。アンプル内の異物82或い
はビンの表面傷84、汚れ86等は、照射光74を遮断
して影像となる。これ等の影像は受光器80に投影され
る。
FIG. 3 is an explanatory diagram of a conventional method for detecting foreign matter by rotating an ampoule at high speed and an apparatus therefor. As shown in FIG.
is irradiated via the light projecting lens 76. After the irradiation light 74 passes through the solution in the ampoule 70, it passes through the imaging lens 78 and reaches the light receiver 80. Foreign matter 82 in the ampoule, surface scratches 84 on the bottle, dirt 86, etc. block the irradiation light 74 and form an image. These images are projected onto the light receiver 80.

このような従来の異物検出方法並びにその装置に於いて
は、アンプル70は高速回転された後、ブレーキが掛け
られて急停止される。異物82は慣性力により浮遊回転
し側面からの透過光74を遮る。異物82の影像は変動
して受光器80に受光変動量として検知される。この場
合に異物82は光量変化を起こすが、アンプル表面の傷
84及び汚れ86は、静止しているために光量変化を起
こさない。この為、異物82はアンプル表面の傷84及
び汚れ86との識別が可能になる。又、アンプル70の
大きさに対応して、一定の面積毎に区切った受光素子8
8が設置され、これらの受光素子88は光電管やフォト
ダイオードが用いられており、速い検査が可能となって
いる。
In such a conventional foreign object detection method and apparatus, the ampoule 70 is rotated at a high speed, and then the brake is applied to suddenly stop the ampoule 70. The foreign object 82 floats and rotates due to inertia and blocks the transmitted light 74 from the side. The image of the foreign object 82 fluctuates and is detected by the light receiver 80 as a variation in received light. In this case, the foreign matter 82 causes a change in the amount of light, but the scratches 84 and dirt 86 on the ampoule surface do not cause a change in the amount of light because they are stationary. Therefore, the foreign matter 82 can be distinguished from the scratches 84 and dirt 86 on the ampoule surface. In addition, the light receiving elements 8 are divided into certain areas corresponding to the size of the ampoule 70.
8 are installed, and phototubes or photodiodes are used for these light receiving elements 88, enabling quick inspection.

しかしながら、このようなアンプル70を高速回転して
溶液中の異物82を慣性回転させる方法では、低粘度(
IOC3T以下)の溶液中の異物82に関しては適用で
きるが、高粘度(100C3T以上)の溶液中の異物8
2ではアンプル70を高速回転させた後、ブレーキを掛
けて急停止させても、内溶液が充分に慣性回転せず、浮
遊異物82は若干移動するが充分に回転されない。従っ
て、異物の透過光74を遮るために起こる影像の変化も
充分体じないため、光量の変化が起こらず異物の検出が
出来ない。また、高粘度の溶液(100C3T以上)中
の異物82に慣性回転を与えるため、アンプル70を高
速回転(約3000rpm以上)させた場合、アンプル
は破損する戊がある。このため、実用のアンプル回転速
度には限界がある。
However, in this method of rotating the ampoule 70 at high speed to inertially rotate the foreign matter 82 in the solution,
It can be applied to foreign matter 82 in solutions with high viscosity (IOC3T or less), but foreign matter 82 in solutions with high viscosity (100C3T or more)
In No. 2, even if the ampoule 70 is rotated at high speed and then suddenly stopped by applying the brake, the internal solution does not undergo sufficient inertial rotation, and although the floating foreign matter 82 moves slightly, it is not rotated sufficiently. Therefore, the change in the image caused by blocking the transmitted light 74 of the foreign object is not sufficiently felt, and the amount of light does not change, making it impossible to detect the foreign object. Furthermore, if the ampoule 70 is rotated at high speed (about 3000 rpm or more) in order to impart inertial rotation to the foreign matter 82 in a high viscosity solution (100C3T or more), the ampoule may be damaged. For this reason, there is a limit to the practical ampoule rotation speed.

〔発明の目的〕[Purpose of the invention]

本発明はこのような事情に鑑みてなされたもので、特に
溶液中の異物が内溶液の粘度に左右されずに正確に検出
される異物検出方法並びにその装置を提供することを目
的としている。
The present invention has been made in view of the above circumstances, and particularly aims to provide a method and apparatus for detecting foreign matter in which foreign matter in a solution can be detected accurately without being affected by the viscosity of the internal solution.

〔発明の概要〕[Summary of the invention]

本発明は前記目的を達成するために、透明容器内の溶液
中に浮遊する異物を検出する異物検出方法に於いて、前
記透明容器は回転されると共に回転開始前の透明容器の
位置と同位置に停止され、込明容器に光を照射して、照
射光を受けた溶液内の異物から発せられる反射光の輝点
の位置を容器の回転開始前と回転停止後に夫々検出比較
して溶液中の異物を検出するようにしたことを特徴とす
る。
In order to achieve the above object, the present invention provides a foreign object detection method for detecting foreign objects floating in a solution in a transparent container, in which the transparent container is rotated and positioned at the same position as the transparent container before the rotation starts. The light is irradiated onto the container, and the position of the bright spot of the reflected light emitted from the foreign matter in the solution that receives the irradiated light is detected and compared before the container starts rotating and after the rotation has stopped. It is characterized by detecting foreign objects.

〔実施例〕〔Example〕

以下添付図面に従って、本発明に係る異物検出方法並び
にその装置に係る好ましい実施例を詳説する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the foreign object detection method and device according to the present invention will be described in detail below with reference to the accompanying drawings.

第1図は本発明に係る異物検出方法並びにその装置の説
明図である。第1図に示すように容器10はガラス製の
透明容器から形成される。尚、場合によっては容器10
は透明なプラスチックで形成してもよい。容器10は回
転装置11により回転数300Orpm以下で回転され
る。回転装置11にはステップモータが使用され、36
0°×N回を単位として容器10は回転又は停止される
FIG. 1 is an explanatory diagram of a foreign object detection method and apparatus according to the present invention. As shown in FIG. 1, the container 10 is formed from a transparent container made of glass. In addition, depending on the case, the container 10
may be made of transparent plastic. The container 10 is rotated by a rotating device 11 at a rotational speed of 300 rpm or less. A step motor is used for the rotating device 11, and 36
The container 10 is rotated or stopped in units of 0°×N times.

従って、容器IOは所定時間回転された後、回転開始以
前の容器10の位置と同位置に停止される。容器10の
下方には光源12が設けられ、光源12からの照射光1
3は投光レンズを介して容器10及び容器10内の溶液
に向けて照射される。
Therefore, after the container IO has been rotated for a predetermined period of time, it is stopped at the same position as the container 10 before the rotation started. A light source 12 is provided below the container 10, and irradiation light 1 from the light source 12 is provided.
3 is irradiated toward the container 10 and the solution within the container 10 through a projection lens.

容器10内の溶液中の異物14、容器10の表面傷16
及び汚れ18は照射光13を受けて反射光15.17.
19を発する。容器10の側方には撮像管20が設けら
れ、撮像管20は異物14、表面傷16及び汚れ18か
らの反射光15.17.19を受光する受光器である。
Foreign matter 14 in the solution in the container 10, surface scratches 16 on the container 10
and the dirt 18 receives the irradiation light 13 and reflects the reflected light 15.17.
Emit 19. An image pickup tube 20 is provided on the side of the container 10, and the image pickup tube 20 is a light receiver that receives reflected light 15, 17, and 19 from the foreign matter 14, surface scratches 16, and dirt 18.

撮像管20には比較装置22が接続され、比較装置22
には撮像管20が受光した反射光15.17.19のデ
ータ信号26が人力される。容器100回転開始前と停
止後に於けるデータ信号26が比較装置22に入力され
、各データ信号26は比較装置22によってビデオ信号
から2値化ビデオ信号に処理される。データ信号26は
、2次元的に処理されて反射光の輝点跡として検知され
る。検知されるH点跡の解像度はCRTモニタした場合
に少なくとも640 (水平)X512(垂直)X64
(輝度)階調が可能である。
A comparison device 22 is connected to the image pickup tube 20.
The data signal 26 of the reflected light 15, 17, and 19 received by the image pickup tube 20 is input manually. Data signals 26 before the rotation of the container 100 starts and after it stops are input to the comparison device 22, and each data signal 26 is processed by the comparison device 22 from a video signal to a binary video signal. The data signal 26 is two-dimensionally processed and detected as a bright spot trace of reflected light. The resolution of the detected H point trace is at least 640 (horizontal) x 512 (vertical) x 64 when monitored on a CRT.
(Brightness) gradation is possible.

比較装置22にはRAM機構及び比較演算機構が内蔵さ
れ、RAM機構は容器10の回転開始前のデータ信号2
6を記憶する。又比較演算機構は容器10の回転開始前
のデータ信号26と回転停止後のデータ信号26とを比
較処理する。この場合には、回転開始前のデータ信号2
6が対照とされて回転開始前のデータ値は回転停止後の
データ値から引算される。このように比較装置22によ
って容器100回転開始前と回転停止後の夫々のデータ
信号26.26を比較処理したものをCRTモニタ等で
観察した場合には、第2図に示すように溶液中の異物1
4の反射光の輝点が輝点跡14A、14Bとして2次元
投影画像の所定の位置にモニタされる。容器10の回転
開始前と停止後に於いて、異物14が容器10の溶液内
でずれた場合には、溶液中の異物14の反射光の輝点跡
の像は、容器lOの回転開始前に於けるマイナス値の輝
点跡14A(第2図の0跡)と、回転停止後に於けるプ
ラス値の輝点跡14B(第2図の黒跡)とが観察される
The comparison device 22 has a built-in RAM mechanism and a comparison calculation mechanism, and the RAM mechanism receives the data signal 2 before the rotation of the container 10 starts.
Remember 6. Further, the comparison calculation mechanism compares and processes the data signal 26 before the rotation of the container 10 starts and the data signal 26 after the rotation has stopped. In this case, the data signal 2 before the start of rotation
6 is used as a reference, and the data value before the rotation starts is subtracted from the data value after the rotation stops. When the comparator 22 compares and processes the data signals 26 and 26 before the container starts rotating 100 times and after it stops rotating, and observes it on a CRT monitor, etc., as shown in FIG. Foreign object 1
The bright spots of the reflected light No. 4 are monitored as bright spot traces 14A and 14B at predetermined positions on the two-dimensional projection image. If the foreign object 14 is displaced within the solution in the container 10 before and after the rotation of the container 10 is started and after the rotation of the container 10 is stopped, the image of the bright spot trace of the reflected light of the foreign object 14 in the solution will be A bright spot trace 14A with a negative value (0 trace in FIG. 2) and a bright spot trace 14B with a positive value after the rotation has stopped (black trace in FIG. 2) are observed.

前記の如く構成された本発明に係る異物検出方法並びに
その装置によれば、容器10には光源12の照射光13
が照射される。描像管20が受光した異物14等の反射
光15.17.19の受光データはデータ信号26とし
て容器lOの回転開始前及び回転停止後に於いて夫々比
較装置22に取り込まれる。夫々のデータ信号26は比
較装置22によってビデオ信号から2値化ビデオ信号に
変換され、内蔵される比較機構によって回転開始前のデ
ータ信号26を対照として演算処理される又、容HIO
を回転させた後、急停止させた時の慣性力によって、溶
液中の異物14の回転開始前と回転停止後の位置はずれ
を生じる。この場合に於いて、容器10の回転速度が遅
く、且つ容器10内の溶液が高粘度であっても、異物1
4の位置は容易に溶液内でずれを生じる。ずれを生じた
異物14による反射光の輝点跡14A、14Bは、第2
図に示すようにマイナス値の輝点跡14Aとプラス値の
輝点跡14Bとに分かれて写出される。一方、容器10
の表面傷16及び汚れ18による反射光の輝点跡は、容
器10の回転開始前と回転停止後の容器10位置が同位
置であるため、輝点跡の位置が一致する。このため、容
器の傷16及び汚れ18の反射光の輝点跡は容器10の
回転開始前のマイナス値の輝点光量と停止後のプラス値
の輝点光量とが相殺されCRTによって写出されない。
According to the foreign object detection method and device thereof according to the present invention configured as described above, the container 10 receives the irradiation light 13 from the light source 12.
is irradiated. The light reception data of the reflected light 15, 17, 19 from the foreign object 14, etc. received by the image tube 20 is taken in as a data signal 26 into the comparator 22 before the rotation of the container 1O starts and after the rotation is stopped, respectively. Each data signal 26 is converted from a video signal to a binary video signal by a comparator 22, and arithmetic processing is performed by a built-in comparison mechanism using the data signal 26 before the start of rotation as a comparison.
Due to the inertial force when the rotation is abruptly stopped after rotation, the position of the foreign object 14 in the solution before the rotation starts and after the rotation is stopped is shifted. In this case, even if the rotation speed of the container 10 is slow and the solution in the container 10 has a high viscosity, the foreign matter 1
The position of 4 easily causes displacement within the solution. The bright spot traces 14A and 14B of the reflected light from the foreign object 14 that has shifted are the second
As shown in the figure, the image is divided into a bright spot trace 14A with a negative value and a bright spot trace 14B with a positive value. On the other hand, container 10
The positions of the bright spot traces of the reflected light due to the surface scratches 16 and dirt 18 coincide because the positions of the container 10 are the same before the rotation of the container 10 starts and after the rotation of the container 10 is stopped. Therefore, bright spot traces of reflected light from the scratches 16 and dirt 18 on the container are not captured by the CRT because the bright spot light intensity with a negative value before the rotation of the container 10 starts and the bright spot light quantity with a positive value after the rotation of the container 10 has stopped are canceled out. .

従って、このように処理される比較装置22においては
、異物14による反射光の輝点跡14A、14Bのみが
明確に検知され、容器10内の異物14は表面傷16及
び汚れ18と区別して正確に検出される。
Therefore, in the comparison device 22 processed in this manner, only the bright spots 14A and 14B of the light reflected by the foreign object 14 are clearly detected, and the foreign object 14 inside the container 10 is accurately distinguished from the surface scratches 16 and dirt 18. detected.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明に係る異物検出方法並びにそ
の装置によれば、透明容器を回転させて回転開始前の容
器の位置と同位置に停止させ、透明容器に照射される光
を受けた溶液内の異物から発せられる反射光の輝点を容
器の回転開始前と回転開始後に測定して溶液中の異物を
検出するようにしたので、容器内の異物は溶液の粘度に
左右されることなく容器の表面の傷あと或いは汚れ等と
識別が明確に出来ると共に異物の検出を確実にすること
が出来る。
As explained above, according to the method and device for detecting foreign matter according to the present invention, a transparent container is rotated and stopped at the same position as the container before the start of rotation, and a solution that receives light irradiated onto the transparent container is Foreign matter in the solution is detected by measuring the bright spot of reflected light emitted from the foreign matter in the container before and after the container starts rotating, so foreign matter in the container is not affected by the viscosity of the solution. It is possible to clearly distinguish scratches, dirt, etc. on the surface of the container, and to ensure the detection of foreign substances.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る異物検出方法並びにその装置の説
明図、第2図は第1図の異物検出装置の比較装置によっ
てデータ信号を処理したときのCRTモニタの2次元投
影画像図、第3図は従来の異物検出装置の説明図である
。 10・・・容器、 11・・・回転装置、 12・・・
光源、 14・・・異物、 20・・・撮像管、 22
・・・比較装置。 出願人 日立プラント建設株式会社 第1図 第2図 CRT玉;り
FIG. 1 is an explanatory diagram of the foreign object detection method and device according to the present invention, and FIG. 2 is a two-dimensional projected image diagram of a CRT monitor when a data signal is processed by the comparison device of the foreign object detection device of FIG. FIG. 3 is an explanatory diagram of a conventional foreign object detection device. 10... Container, 11... Rotating device, 12...
Light source, 14... Foreign object, 20... Image pickup tube, 22
...Comparison device. Applicant: Hitachi Plant Construction Co., Ltd. Figure 1 Figure 2 CRT ball;

Claims (2)

【特許請求の範囲】[Claims] (1)透明容器内の溶液中に浮遊する異物を検出する異
物検出方法に於いて、前記透明容器は回転されると共に
回転開始前の透明容器の位置と同位置に停止され、透明
容器に光を照射して、照射光を受けた溶液内の異物から
発せられる反射光の輝点の位置を容器の回転開始前と回
転停止後に夫々検出比較して溶液中の異物を検出するよ
うにしたことを特徴とする異物検出方法。
(1) In a foreign object detection method for detecting foreign objects floating in a solution in a transparent container, the transparent container is rotated and stopped at the same position as the transparent container before the start of rotation, and the transparent container is exposed to light. Foreign matter in the solution is detected by detecting and comparing the positions of bright spots of reflected light emitted from foreign matter in the solution that has been irradiated with the irradiated light before the container starts rotating and after the rotation of the container has stopped. A foreign object detection method characterized by:
(2)透明容器内の溶液中に浮遊する異物を検出する異
物検出装置に於いて、前記透明容器を回転させると共に
回転開始前の位置と同位置に停止させる回転装置と、透
明容器に光を照射する光源と、光源からの光を受けた溶
液中の異物から発せられる反射光の輝点の位置を受光検
知する受光器と、受光器によって回転開始前に検知され
た反射光の輝点と回転停止後に検知された反射光の輝点
とを比較する比較装置とから構成されることを特徴とす
る異物検出装置。
(2) A foreign object detection device that detects foreign objects floating in a solution in a transparent container includes a rotating device that rotates the transparent container and stops it at the same position as before starting rotation, and a rotating device that illuminates the transparent container. A light source to irradiate, a light receiver that receives and detects the position of a bright spot of reflected light emitted from a foreign substance in a solution that receives light from the light source, and a bright spot of reflected light detected by the light receiver before rotation starts. A foreign object detection device comprising: a comparison device that compares a bright spot of reflected light detected after rotation has stopped.
JP23373986A 1986-10-02 1986-10-02 Method and apparatus for detecting foreign matter Pending JPS6388433A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23373986A JPS6388433A (en) 1986-10-02 1986-10-02 Method and apparatus for detecting foreign matter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23373986A JPS6388433A (en) 1986-10-02 1986-10-02 Method and apparatus for detecting foreign matter

Publications (1)

Publication Number Publication Date
JPS6388433A true JPS6388433A (en) 1988-04-19

Family

ID=16959818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23373986A Pending JPS6388433A (en) 1986-10-02 1986-10-02 Method and apparatus for detecting foreign matter

Country Status (1)

Country Link
JP (1) JPS6388433A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006008819A1 (en) * 2004-07-22 2006-01-26 Eisai R & D Management Co., Ltd. Method for inspecting foreign matter in solution and equipment therefor
WO2011152276A1 (en) * 2010-05-31 2011-12-08 日立情報制御ソリューションズ Foreign matter inspection device and foreign matter inspection method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006008819A1 (en) * 2004-07-22 2006-01-26 Eisai R & D Management Co., Ltd. Method for inspecting foreign matter in solution and equipment therefor
WO2011152276A1 (en) * 2010-05-31 2011-12-08 日立情報制御ソリューションズ Foreign matter inspection device and foreign matter inspection method
US9710731B2 (en) 2010-05-31 2017-07-18 Hitachi Information & Control Solutions, Ltd. Foreign matter inspection device and foreign matter inspection method

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