JPS6388405U - - Google Patents

Info

Publication number
JPS6388405U
JPS6388405U JP18391886U JP18391886U JPS6388405U JP S6388405 U JPS6388405 U JP S6388405U JP 18391886 U JP18391886 U JP 18391886U JP 18391886 U JP18391886 U JP 18391886U JP S6388405 U JPS6388405 U JP S6388405U
Authority
JP
Japan
Prior art keywords
wafer
pellet
pellets
passing
divided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18391886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18391886U priority Critical patent/JPS6388405U/ja
Publication of JPS6388405U publication Critical patent/JPS6388405U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP18391886U 1986-11-28 1986-11-28 Pending JPS6388405U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18391886U JPS6388405U (OSRAM) 1986-11-28 1986-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18391886U JPS6388405U (OSRAM) 1986-11-28 1986-11-28

Publications (1)

Publication Number Publication Date
JPS6388405U true JPS6388405U (OSRAM) 1988-06-08

Family

ID=31131097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18391886U Pending JPS6388405U (OSRAM) 1986-11-28 1986-11-28

Country Status (1)

Country Link
JP (1) JPS6388405U (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03167839A (ja) * 1989-11-28 1991-07-19 Nec Kansai Ltd ダイシング方法
JP2012038867A (ja) * 2010-08-05 2012-02-23 Disco Abrasive Syst Ltd 分割方法
JP2017041525A (ja) * 2015-08-19 2017-02-23 株式会社ディスコ ウエーハの分割方法
JP2019069611A (ja) * 2014-08-21 2019-05-09 三星ダイヤモンド工業株式会社 ブレイク装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03167839A (ja) * 1989-11-28 1991-07-19 Nec Kansai Ltd ダイシング方法
JP2012038867A (ja) * 2010-08-05 2012-02-23 Disco Abrasive Syst Ltd 分割方法
JP2019069611A (ja) * 2014-08-21 2019-05-09 三星ダイヤモンド工業株式会社 ブレイク装置
JP2017041525A (ja) * 2015-08-19 2017-02-23 株式会社ディスコ ウエーハの分割方法

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