JPS6386946U - - Google Patents
Info
- Publication number
- JPS6386946U JPS6386946U JP18013886U JP18013886U JPS6386946U JP S6386946 U JPS6386946 U JP S6386946U JP 18013886 U JP18013886 U JP 18013886U JP 18013886 U JP18013886 U JP 18013886U JP S6386946 U JPS6386946 U JP S6386946U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- chip
- machine
- processing device
- member provided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002826 coolant Substances 0.000 claims description 7
- 238000000926 separation method Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims 1
Landscapes
- Auxiliary Devices For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18013886U JPS6386946U (enrdf_load_stackoverflow) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18013886U JPS6386946U (enrdf_load_stackoverflow) | 1986-11-21 | 1986-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6386946U true JPS6386946U (enrdf_load_stackoverflow) | 1988-06-06 |
Family
ID=31123820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18013886U Pending JPS6386946U (enrdf_load_stackoverflow) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6386946U (enrdf_load_stackoverflow) |
-
1986
- 1986-11-21 JP JP18013886U patent/JPS6386946U/ja active Pending
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