JPS6385664U - - Google Patents
Info
- Publication number
- JPS6385664U JPS6385664U JP18014786U JP18014786U JPS6385664U JP S6385664 U JPS6385664 U JP S6385664U JP 18014786 U JP18014786 U JP 18014786U JP 18014786 U JP18014786 U JP 18014786U JP S6385664 U JPS6385664 U JP S6385664U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- chamber
- wafer
- arm
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003028 elevating effect Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000005192 partition Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986180147U JPH0623562Y2 (ja) | 1986-11-21 | 1986-11-21 | エンドステ−シヨン |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986180147U JPH0623562Y2 (ja) | 1986-11-21 | 1986-11-21 | エンドステ−シヨン |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6385664U true JPS6385664U (zh) | 1988-06-04 |
JPH0623562Y2 JPH0623562Y2 (ja) | 1994-06-22 |
Family
ID=31123838
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986180147U Expired - Lifetime JPH0623562Y2 (ja) | 1986-11-21 | 1986-11-21 | エンドステ−シヨン |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0623562Y2 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02294474A (ja) * | 1989-04-14 | 1990-12-05 | Leybold Ag | カソードスパツタリング装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6280268U (zh) * | 1985-11-08 | 1987-05-22 |
-
1986
- 1986-11-21 JP JP1986180147U patent/JPH0623562Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6280268U (zh) * | 1985-11-08 | 1987-05-22 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02294474A (ja) * | 1989-04-14 | 1990-12-05 | Leybold Ag | カソードスパツタリング装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0623562Y2 (ja) | 1994-06-22 |