JPS6385403A - 厚膜回路形成装置における基板高さ測定装置 - Google Patents

厚膜回路形成装置における基板高さ測定装置

Info

Publication number
JPS6385403A
JPS6385403A JP61233593A JP23359386A JPS6385403A JP S6385403 A JPS6385403 A JP S6385403A JP 61233593 A JP61233593 A JP 61233593A JP 23359386 A JP23359386 A JP 23359386A JP S6385403 A JPS6385403 A JP S6385403A
Authority
JP
Japan
Prior art keywords
height
light
thick film
height measuring
measuring instrument
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61233593A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0433363B2 (https=
Inventor
Katsuhiko Taguchi
田口　克彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Juki Corp
Original Assignee
Juki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Juki Corp filed Critical Juki Corp
Priority to JP61233593A priority Critical patent/JPS6385403A/ja
Publication of JPS6385403A publication Critical patent/JPS6385403A/ja
Publication of JPH0433363B2 publication Critical patent/JPH0433363B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP61233593A 1986-09-30 1986-09-30 厚膜回路形成装置における基板高さ測定装置 Granted JPS6385403A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61233593A JPS6385403A (ja) 1986-09-30 1986-09-30 厚膜回路形成装置における基板高さ測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61233593A JPS6385403A (ja) 1986-09-30 1986-09-30 厚膜回路形成装置における基板高さ測定装置

Publications (2)

Publication Number Publication Date
JPS6385403A true JPS6385403A (ja) 1988-04-15
JPH0433363B2 JPH0433363B2 (https=) 1992-06-02

Family

ID=16957489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61233593A Granted JPS6385403A (ja) 1986-09-30 1986-09-30 厚膜回路形成装置における基板高さ測定装置

Country Status (1)

Country Link
JP (1) JPS6385403A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0252742A (ja) * 1988-08-17 1990-02-22 Hitachi Techno Eng Co Ltd スクリーンレスパターン描画装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0252742A (ja) * 1988-08-17 1990-02-22 Hitachi Techno Eng Co Ltd スクリーンレスパターン描画装置

Also Published As

Publication number Publication date
JPH0433363B2 (https=) 1992-06-02

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