JPS6384946U - - Google Patents
Info
- Publication number
- JPS6384946U JPS6384946U JP17955386U JP17955386U JPS6384946U JP S6384946 U JPS6384946 U JP S6384946U JP 17955386 U JP17955386 U JP 17955386U JP 17955386 U JP17955386 U JP 17955386U JP S6384946 U JPS6384946 U JP S6384946U
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- probe
- conductive
- supporting
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000007689 inspection Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17955386U JPH0341466Y2 (nl) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17955386U JPH0341466Y2 (nl) | 1986-11-20 | 1986-11-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6384946U true JPS6384946U (nl) | 1988-06-03 |
| JPH0341466Y2 JPH0341466Y2 (nl) | 1991-08-30 |
Family
ID=31122716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17955386U Expired JPH0341466Y2 (nl) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341466Y2 (nl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002082528A1 (fr) * | 2001-04-04 | 2002-10-17 | Fujitsu Limited | Appareil contacteur pour dispositif semi-conducteur et procede de test dudit dispositif semi-conducteur |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110023773B (zh) * | 2017-02-22 | 2022-03-01 | 新东工业株式会社 | 测试系统 |
-
1986
- 1986-11-20 JP JP17955386U patent/JPH0341466Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002082528A1 (fr) * | 2001-04-04 | 2002-10-17 | Fujitsu Limited | Appareil contacteur pour dispositif semi-conducteur et procede de test dudit dispositif semi-conducteur |
| JPWO2002082528A1 (ja) * | 2001-04-04 | 2004-07-29 | 富士通株式会社 | 半導体装置用コンタクタ装置及び半導体装置の試験方法 |
| JP4794808B2 (ja) * | 2001-04-04 | 2011-10-19 | 富士通セミコンダクター株式会社 | 半導体装置用コンタクタ装置及び半導体装置の試験方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0341466Y2 (nl) | 1991-08-30 |