JPS6384587U - - Google Patents

Info

Publication number
JPS6384587U
JPS6384587U JP18065886U JP18065886U JPS6384587U JP S6384587 U JPS6384587 U JP S6384587U JP 18065886 U JP18065886 U JP 18065886U JP 18065886 U JP18065886 U JP 18065886U JP S6384587 U JPS6384587 U JP S6384587U
Authority
JP
Japan
Prior art keywords
sample
detection section
electron detection
counting device
sealed structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18065886U
Other languages
Japanese (ja)
Other versions
JPH0542377Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986180658U priority Critical patent/JPH0542377Y2/ja
Publication of JPS6384587U publication Critical patent/JPS6384587U/ja
Application granted granted Critical
Publication of JPH0542377Y2 publication Critical patent/JPH0542377Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示した説明図、第
２，３図は本考案の他の実施例を示した説明図、
第４図は従来例を示した説明図である。 １：電子検出部、２：金属ケース（陰極）、３
：絶縁材、４：陽極リング、５：電気回路、７：
第１格子電極、８：第２格子電極、９：試料台、
１０：試料、１１：光源装置、１３：透過窓、１
４：扉、１５：試料取出口、１６，２４：配管、
１７：流量計、１８：ポンプ、２０：ドライガス
発生装置、２２：ガス発生装置、２５，２６，２
７，２９：切換バルブ、３０：排気管、３２：密
閉容器。 Fig. 1 is an explanatory diagram showing one embodiment of the present invention, Figs. 2 and 3 are explanatory diagrams showing other embodiments of the present invention,
FIG. 4 is an explanatory diagram showing a conventional example. 1: Electronic detection section, 2: Metal case (cathode), 3
: Insulating material, 4: Anode ring, 5: Electric circuit, 7:
1st grid electrode, 8: 2nd grid electrode, 9: sample stage,
10: Sample, 11: Light source device, 13: Transmission window, 1
4: Door, 15: Sample extraction port, 16, 24: Piping,
17: Flowmeter, 18: Pump, 20: Dry gas generator, 22: Gas generator, 25, 26, 2
7, 29: switching valve, 30: exhaust pipe, 32: sealed container.

Claims (1)

【実用新案登録請求の範囲】 試料に光を照射し、該試料から放出される電子
を電子検出部に導入して電子の数を計数する電子
計数装置に於いて、 前記試料の設置台を含む電子検出部内を密閉構
造とし、該密閉構造とした前記電子検出部内の雰
囲気を吸引すると共に水分を除去したドライエア
ー、不活性ガス等のドライガスを送り込んで循環
させるドライガス循環手段を設けたことを特徴と
する電子計数装置。[Claims for Utility Model Registration] An electronic counting device that counts the number of electrons by irradiating a sample with light and introducing electrons emitted from the sample into an electron detection section, including a stand for mounting the sample. The inside of the electron detection section is made into a sealed structure, and a dry gas circulation means is provided for sucking the atmosphere inside the electron detection section having the sealed structure and feeding and circulating a dry gas such as dry air or inert gas from which moisture has been removed. An electronic counting device featuring:
JP1986180658U 1986-11-25 1986-11-25 Expired - Lifetime JPH0542377Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986180658U JPH0542377Y2 (en) 1986-11-25 1986-11-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986180658U JPH0542377Y2 (en) 1986-11-25 1986-11-25

Publications (2)

Publication Number Publication Date
JPS6384587U true JPS6384587U (en) 1988-06-02
JPH0542377Y2 JPH0542377Y2 (en) 1993-10-26

Family

ID=31124815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986180658U Expired - Lifetime JPH0542377Y2 (en) 1986-11-25 1986-11-25

Country Status (1)

Country Link
JP (1) JPH0542377Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6451886U (en) * 1987-09-25 1989-03-30

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS527785A (en) * 1975-07-09 1977-01-21 Rikagaku Kenkyusho Counter tube for measuring low-speed electrons
JPS55126879A (en) * 1979-03-26 1980-10-01 Aloka Co Ltd Method and device for supplying counting gas for radiation measuring instrument
JPS59195177A (en) * 1983-04-20 1984-11-06 Rikagaku Kenkyusho Counting method of photoelectron
JPS6059986U (en) * 1983-09-30 1985-04-25 株式会社東芝 Radiation measuring device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6059986B2 (en) * 1981-05-19 1985-12-27 新日本製鐵株式会社 Manufacturing method of single-sided plated steel plate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS527785A (en) * 1975-07-09 1977-01-21 Rikagaku Kenkyusho Counter tube for measuring low-speed electrons
JPS55126879A (en) * 1979-03-26 1980-10-01 Aloka Co Ltd Method and device for supplying counting gas for radiation measuring instrument
JPS59195177A (en) * 1983-04-20 1984-11-06 Rikagaku Kenkyusho Counting method of photoelectron
JPS6059986U (en) * 1983-09-30 1985-04-25 株式会社東芝 Radiation measuring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6451886U (en) * 1987-09-25 1989-03-30

Also Published As

Publication number Publication date
JPH0542377Y2 (en) 1993-10-26

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