JPS6384005A - 垂直磁化膜の形成方法 - Google Patents

垂直磁化膜の形成方法

Info

Publication number
JPS6384005A
JPS6384005A JP22913086A JP22913086A JPS6384005A JP S6384005 A JPS6384005 A JP S6384005A JP 22913086 A JP22913086 A JP 22913086A JP 22913086 A JP22913086 A JP 22913086A JP S6384005 A JPS6384005 A JP S6384005A
Authority
JP
Japan
Prior art keywords
target
film
substrate
sputtering
perpendicularly magnetized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22913086A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0565043B2 (enrdf_load_stackoverflow
Inventor
Shinji Yamashita
山下　慎次
Mitsuaki Ikeda
満昭 池田
Kenji Hara
賢治 原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Manufacturing Co Ltd filed Critical Yaskawa Electric Manufacturing Co Ltd
Priority to JP22913086A priority Critical patent/JPS6384005A/ja
Publication of JPS6384005A publication Critical patent/JPS6384005A/ja
Publication of JPH0565043B2 publication Critical patent/JPH0565043B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP22913086A 1986-09-26 1986-09-26 垂直磁化膜の形成方法 Granted JPS6384005A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22913086A JPS6384005A (ja) 1986-09-26 1986-09-26 垂直磁化膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22913086A JPS6384005A (ja) 1986-09-26 1986-09-26 垂直磁化膜の形成方法

Publications (2)

Publication Number Publication Date
JPS6384005A true JPS6384005A (ja) 1988-04-14
JPH0565043B2 JPH0565043B2 (enrdf_load_stackoverflow) 1993-09-16

Family

ID=16887221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22913086A Granted JPS6384005A (ja) 1986-09-26 1986-09-26 垂直磁化膜の形成方法

Country Status (1)

Country Link
JP (1) JPS6384005A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4238400A1 (en) * 1991-11-14 1993-05-19 Victor Company Of Japan Transverse magnetic recording material mfr. - uses sputtering process to form film of Neodymium-Iron-Boron on surface of non magnetic carrier.
JP2012207274A (ja) * 2011-03-30 2012-10-25 Hitachi Metals Ltd 永久磁石薄膜用スパッタリングターゲット及びその製造方法
WO2014038022A1 (ja) * 2012-09-05 2014-03-13 株式会社日立製作所 Ｎｄ－Ｆｅ－Ｂ薄膜磁石およびその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60128606A (ja) * 1983-12-15 1985-07-09 Seiko Instr & Electronics Ltd 光磁気記録媒体

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60128606A (ja) * 1983-12-15 1985-07-09 Seiko Instr & Electronics Ltd 光磁気記録媒体

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4238400A1 (en) * 1991-11-14 1993-05-19 Victor Company Of Japan Transverse magnetic recording material mfr. - uses sputtering process to form film of Neodymium-Iron-Boron on surface of non magnetic carrier.
US5612145A (en) * 1991-11-14 1997-03-18 Victor Company Of Japan, Ltd. Perpendicular magnetic medium and manufacturing method for the medium
JP2012207274A (ja) * 2011-03-30 2012-10-25 Hitachi Metals Ltd 永久磁石薄膜用スパッタリングターゲット及びその製造方法
WO2014038022A1 (ja) * 2012-09-05 2014-03-13 株式会社日立製作所 Ｎｄ－Ｆｅ－Ｂ薄膜磁石およびその製造方法
JPWO2014038022A1 (ja) * 2012-09-05 2016-08-08 株式会社日立製作所 Ｎｄ−Ｆｅ−Ｂ薄膜磁石およびその製造方法

Also Published As

Publication number Publication date
JPH0565043B2 (enrdf_load_stackoverflow) 1993-09-16

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