JPS638243U - - Google Patents

Info

Publication number
JPS638243U
JPS638243U JP10135286U JP10135286U JPS638243U JP S638243 U JPS638243 U JP S638243U JP 10135286 U JP10135286 U JP 10135286U JP 10135286 U JP10135286 U JP 10135286U JP S638243 U JPS638243 U JP S638243U
Authority
JP
Japan
Prior art keywords
push
wafer transfer
vertical shaft
support plate
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10135286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH068100Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986101352U priority Critical patent/JPH068100Y2/ja
Publication of JPS638243U publication Critical patent/JPS638243U/ja
Application granted granted Critical
Publication of JPH068100Y2 publication Critical patent/JPH068100Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1986101352U 1986-07-01 1986-07-01 ウエハ移し替え突き上げ装置 Expired - Lifetime JPH068100Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986101352U JPH068100Y2 (ja) 1986-07-01 1986-07-01 ウエハ移し替え突き上げ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986101352U JPH068100Y2 (ja) 1986-07-01 1986-07-01 ウエハ移し替え突き上げ装置

Publications (2)

Publication Number Publication Date
JPS638243U true JPS638243U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-01-20
JPH068100Y2 JPH068100Y2 (ja) 1994-03-02

Family

ID=30972010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986101352U Expired - Lifetime JPH068100Y2 (ja) 1986-07-01 1986-07-01 ウエハ移し替え突き上げ装置

Country Status (1)

Country Link
JP (1) JPH068100Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02134011U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-04-14 1990-11-07
JPH03121005A (ja) * 1989-09-23 1991-05-23 A Raymond Gmbh & Co Kg プラスチック製ボタン

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58213438A (ja) * 1982-05-24 1983-12-12 バリアン・アソシエイツ・インコ−ポレイテツド ウエ−ハ移送装置
JPS59101847A (ja) * 1982-12-01 1984-06-12 Seiko Instr & Electronics Ltd 半導体ウエハの受取，受渡し装置
JPS615541A (ja) * 1984-06-20 1986-01-11 Hitachi Electronics Eng Co Ltd 移し替え装置
JPS624142A (ja) * 1985-06-28 1987-01-10 Dainippon Screen Mfg Co Ltd 薄板材の移し替え装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58213438A (ja) * 1982-05-24 1983-12-12 バリアン・アソシエイツ・インコ−ポレイテツド ウエ−ハ移送装置
JPS59101847A (ja) * 1982-12-01 1984-06-12 Seiko Instr & Electronics Ltd 半導体ウエハの受取，受渡し装置
JPS615541A (ja) * 1984-06-20 1986-01-11 Hitachi Electronics Eng Co Ltd 移し替え装置
JPS624142A (ja) * 1985-06-28 1987-01-10 Dainippon Screen Mfg Co Ltd 薄板材の移し替え装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02134011U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-04-14 1990-11-07
JPH03121005A (ja) * 1989-09-23 1991-05-23 A Raymond Gmbh & Co Kg プラスチック製ボタン

Also Published As

Publication number Publication date
JPH068100Y2 (ja) 1994-03-02

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