JPS6380843U - - Google Patents

Info

Publication number
JPS6380843U
JPS6380843U JP17579686U JP17579686U JPS6380843U JP S6380843 U JPS6380843 U JP S6380843U JP 17579686 U JP17579686 U JP 17579686U JP 17579686 U JP17579686 U JP 17579686U JP S6380843 U JPS6380843 U JP S6380843U
Authority
JP
Japan
Prior art keywords
sample
holder
horizontal state
processing chamber
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17579686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17579686U priority Critical patent/JPS6380843U/ja
Publication of JPS6380843U publication Critical patent/JPS6380843U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP17579686U 1986-11-15 1986-11-15 Pending JPS6380843U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17579686U JPS6380843U (enrdf_load_stackoverflow) 1986-11-15 1986-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17579686U JPS6380843U (enrdf_load_stackoverflow) 1986-11-15 1986-11-15

Publications (1)

Publication Number Publication Date
JPS6380843U true JPS6380843U (enrdf_load_stackoverflow) 1988-05-27

Family

ID=31115448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17579686U Pending JPS6380843U (enrdf_load_stackoverflow) 1986-11-15 1986-11-15

Country Status (1)

Country Link
JP (1) JPS6380843U (enrdf_load_stackoverflow)

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