JPS6382936U - - Google Patents

Info

Publication number
JPS6382936U
JPS6382936U JP17705786U JP17705786U JPS6382936U JP S6382936 U JPS6382936 U JP S6382936U JP 17705786 U JP17705786 U JP 17705786U JP 17705786 U JP17705786 U JP 17705786U JP S6382936 U JPS6382936 U JP S6382936U
Authority
JP
Japan
Prior art keywords
sample
chamber
processing chamber
processing
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17705786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17705786U priority Critical patent/JPS6382936U/ja
Publication of JPS6382936U publication Critical patent/JPS6382936U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP17705786U 1986-11-18 1986-11-18 Pending JPS6382936U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17705786U JPS6382936U (enrdf_load_stackoverflow) 1986-11-18 1986-11-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17705786U JPS6382936U (enrdf_load_stackoverflow) 1986-11-18 1986-11-18

Publications (1)

Publication Number Publication Date
JPS6382936U true JPS6382936U (enrdf_load_stackoverflow) 1988-05-31

Family

ID=31117901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17705786U Pending JPS6382936U (enrdf_load_stackoverflow) 1986-11-18 1986-11-18

Country Status (1)

Country Link
JP (1) JPS6382936U (enrdf_load_stackoverflow)

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