JPS6380449A - マイクロ波金属イオン源 - Google Patents

マイクロ波金属イオン源

Info

Publication number
JPS6380449A
JPS6380449A JP61225264A JP22526486A JPS6380449A JP S6380449 A JPS6380449 A JP S6380449A JP 61225264 A JP61225264 A JP 61225264A JP 22526486 A JP22526486 A JP 22526486A JP S6380449 A JPS6380449 A JP S6380449A
Authority
JP
Japan
Prior art keywords
microwave
generation chamber
plasma generation
generating chamber
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61225264A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544769B2 (cs
Inventor
Naoki Suzuki
直樹 鈴木
Tanejiro Ikeda
池田　種次郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP61225264A priority Critical patent/JPS6380449A/ja
Publication of JPS6380449A publication Critical patent/JPS6380449A/ja
Publication of JPH0544769B2 publication Critical patent/JPH0544769B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP61225264A 1986-09-24 1986-09-24 マイクロ波金属イオン源 Granted JPS6380449A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61225264A JPS6380449A (ja) 1986-09-24 1986-09-24 マイクロ波金属イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61225264A JPS6380449A (ja) 1986-09-24 1986-09-24 マイクロ波金属イオン源

Publications (2)

Publication Number Publication Date
JPS6380449A true JPS6380449A (ja) 1988-04-11
JPH0544769B2 JPH0544769B2 (cs) 1993-07-07

Family

ID=16826590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61225264A Granted JPS6380449A (ja) 1986-09-24 1986-09-24 マイクロ波金属イオン源

Country Status (1)

Country Link
JP (1) JPS6380449A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01283745A (ja) * 1988-05-11 1989-11-15 Hitachi Ltd プラズマ発生装置及びプラズマ元素分析装置
JPH088238A (ja) * 1995-05-10 1996-01-12 Hitachi Ltd 加工方法及び加工装置
CN112176406A (zh) * 2020-09-16 2021-01-05 北京清碳科技有限公司 一种单晶金刚石生长设备

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01283745A (ja) * 1988-05-11 1989-11-15 Hitachi Ltd プラズマ発生装置及びプラズマ元素分析装置
JPH088238A (ja) * 1995-05-10 1996-01-12 Hitachi Ltd 加工方法及び加工装置
CN112176406A (zh) * 2020-09-16 2021-01-05 北京清碳科技有限公司 一种单晶金刚石生长设备

Also Published As

Publication number Publication date
JPH0544769B2 (cs) 1993-07-07

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