JPS6379646U - - Google Patents
Info
- Publication number
- JPS6379646U JPS6379646U JP13766986U JP13766986U JPS6379646U JP S6379646 U JPS6379646 U JP S6379646U JP 13766986 U JP13766986 U JP 13766986U JP 13766986 U JP13766986 U JP 13766986U JP S6379646 U JPS6379646 U JP S6379646U
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- wafer boat
- transfer device
- top surface
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13766986U JPS6379646U (es) | 1985-12-04 | 1986-09-08 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18713785 | 1985-12-04 | ||
| JP13766986U JPS6379646U (es) | 1985-12-04 | 1986-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6379646U true JPS6379646U (es) | 1988-05-26 |
Family
ID=33455147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13766986U Pending JPS6379646U (es) | 1985-12-04 | 1986-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6379646U (es) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02263454A (ja) * | 1989-03-20 | 1990-10-26 | Tel Sagami Ltd | 熱処理装置 |
| JPH05174776A (ja) * | 1991-12-20 | 1993-07-13 | Hitachi Ltd | 半導体処理装置のロードロック室 |
-
1986
- 1986-09-08 JP JP13766986U patent/JPS6379646U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02263454A (ja) * | 1989-03-20 | 1990-10-26 | Tel Sagami Ltd | 熱処理装置 |
| JPH05174776A (ja) * | 1991-12-20 | 1993-07-13 | Hitachi Ltd | 半導体処理装置のロードロック室 |