JPS62138444U - - Google Patents
Info
- Publication number
- JPS62138444U JPS62138444U JP2560286U JP2560286U JPS62138444U JP S62138444 U JPS62138444 U JP S62138444U JP 2560286 U JP2560286 U JP 2560286U JP 2560286 U JP2560286 U JP 2560286U JP S62138444 U JPS62138444 U JP S62138444U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- center
- base plate
- transfer device
- gravity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005484 gravity Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2560286U JPS62138444U (es) | 1986-02-24 | 1986-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2560286U JPS62138444U (es) | 1986-02-24 | 1986-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62138444U true JPS62138444U (es) | 1987-09-01 |
Family
ID=30825907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2560286U Pending JPS62138444U (es) | 1986-02-24 | 1986-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62138444U (es) |
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1986
- 1986-02-24 JP JP2560286U patent/JPS62138444U/ja active Pending