JPH01140824U - - Google Patents
Info
- Publication number
- JPH01140824U JPH01140824U JP3653288U JP3653288U JPH01140824U JP H01140824 U JPH01140824 U JP H01140824U JP 3653288 U JP3653288 U JP 3653288U JP 3653288 U JP3653288 U JP 3653288U JP H01140824 U JPH01140824 U JP H01140824U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- holding member
- side surfaces
- rotating plate
- immersing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3653288U JPH01140824U (es) | 1988-03-18 | 1988-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3653288U JPH01140824U (es) | 1988-03-18 | 1988-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01140824U true JPH01140824U (es) | 1989-09-27 |
Family
ID=31263130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3653288U Pending JPH01140824U (es) | 1988-03-18 | 1988-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01140824U (es) |
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1988
- 1988-03-18 JP JP3653288U patent/JPH01140824U/ja active Pending