JPH02146445U - - Google Patents
Info
- Publication number
- JPH02146445U JPH02146445U JP5594389U JP5594389U JPH02146445U JP H02146445 U JPH02146445 U JP H02146445U JP 5594389 U JP5594389 U JP 5594389U JP 5594389 U JP5594389 U JP 5594389U JP H02146445 U JPH02146445 U JP H02146445U
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- chuck mechanism
- horizontal rods
- chucked
- constituted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5594389U JPH02146445U (es) | 1989-05-16 | 1989-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5594389U JPH02146445U (es) | 1989-05-16 | 1989-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146445U true JPH02146445U (es) | 1990-12-12 |
Family
ID=31579338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5594389U Pending JPH02146445U (es) | 1989-05-16 | 1989-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146445U (es) |
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1989
- 1989-05-16 JP JP5594389U patent/JPH02146445U/ja active Pending